公开(公告)号：US20220199352A1

公开(公告)日：2022-06-23

申请号：US17540169

申请日：2021-12-01

Applicant: KLA Corporation

Inventor： Tomas Plettner ,  Doug Larson ,  Mark Cawein ,  Jason W. Huang

IPC: H01J37/10 ,  H01J37/28 ,  H01J37/20

Abstract: A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.

公开(公告)号：US12014895B2

公开(公告)日：2024-06-18

申请号：US17540169

申请日：2021-12-01

Applicant: KLA Corporation

Inventor： Tomas Plettner ,  Doug Larson ,  Mark Cawein ,  Jason W. Huang

IPC: H01J37/10 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/10 ,  H01J37/20 ,  H01J37/28

Abstract: A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.