公开(公告)号：US20200033121A1

公开(公告)日：2020-01-30

申请号：US16513091

申请日：2019-07-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Christophe Wouters ,  Kristof Joris ,  Johan De Greeve

IPC: G01B11/28

Abstract: 3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to a points in a focal plane of the microlens array. The tunable color filter can narrow the light beam to a band at a central wavelength. The lens system can provide longitudinal chromatic aberration whereby different wavelengths are imaged at different distances from the lens system.