公开(公告)号：US20190302033A1

公开(公告)日：2019-10-03

申请号：US16443616

申请日：2019-06-17

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01R31/28 ,  G01R31/01 ,  G01R31/26 ,  G01N21/88 ,  G01N21/956

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

公开(公告)号：US20160313257A1

公开(公告)日：2016-10-27

申请号：US15200613

申请日：2016-07-01

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/9505 ,  G01N21/95684 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

Abstract translation: 公开了一种用于工件中的缺陷检测的装置，方法和计算机程序产品。 提供至少一个光源，并且光源产生工件透明的波长范围的照明光。 相机通过镜头将来自工件的至少一个面的光图像到摄像机的检测器上。 工作台用于移动工件并用摄像机对半导体器件的至少一个面进行成像。 该计算机程序产品设置在非暂时的计算机可读介质上，用于工件中的缺陷检测。 计算机用于执行各种处理步骤并控制装置的各种装置。

公开(公告)号：US20200033121A1

公开(公告)日：2020-01-30

申请号：US16513091

申请日：2019-07-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Christophe Wouters ,  Kristof Joris ,  Johan De Greeve

IPC: G01B11/28

Abstract: 3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to a points in a focal plane of the microlens array. The tunable color filter can narrow the light beam to a band at a central wavelength. The lens system can provide longitudinal chromatic aberration whereby different wavelengths are imaged at different distances from the lens system.

公开(公告)号：US10324044B2

公开(公告)日：2019-06-18

申请号：US15200613

申请日：2016-07-01

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28 ,  G01N21/88 ,  G01N21/956

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

公开(公告)号：US09778192B2

公开(公告)日：2017-10-03

申请号：US14632486

申请日：2015-02-26

Applicant: KLA-Tencor Corporation

Inventor： Christophe Wouters ,  Steven Boeykens ,  Carl Smets

IPC: G01N21/00 ,  H04N7/18 ,  G01N21/64 ,  G01N21/88 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/958 ,  G01N2201/02 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/06193 ,  G01N2201/062

Abstract: An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.

公开(公告)号：US20150168304A1

公开(公告)日：2015-06-18

申请号：US14632486

申请日：2015-02-26

Applicant: KLA-Tencor Corporation

Inventor： Christophe Wouters ,  Steven Boeykens ,  Carl Smets

IPC: G01N21/64 ,  G01N21/958 ,  G01N21/95

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/958 ,  G01N2201/02 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/06193 ,  G01N2201/062

Abstract: An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.

Abstract translation: 公开了用于透明或半透明物体的背光检查的物体载体，系统和方法。 载体具有带有光致发光性质的载体基层，其在层的顶部承载透明或半透明物体。 透明或半透明物体可以是晶片，物体载体可以是晶片卡盘。 至少一个光源布置在物体载体上方，使得从至少一个光源发射的激发光通过透明或半透明物体被引导到具有光发光性质的层。 由具有光发光性质的层返回的光被物镜收集并由传感器记录。

公开(公告)号：US10935503B2

公开(公告)日：2021-03-02

申请号：US16443616

申请日：2019-06-17

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01N21/88 ,  G01N21/956 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.