公开(公告)号：US10340114B1

公开(公告)日：2019-07-02

申请号：US15980212

申请日：2018-05-15

Applicant: KLA-TENCOR CORPORATION

Inventor： Sameet K Shriyan ,  Oscar Florendo ,  Joseph Maurino ,  Daniel Bui

IPC: H01J37/12 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/1472 ,  H01J37/28 ,  H01J2237/1516

Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.