公开(公告)号：US09934933B1

公开(公告)日：2018-04-03

申请号：US15593900

申请日：2017-05-12

Applicant: KLA-Tencor Corporation

Inventor： Laurence S. Hordon ,  Nikolai Chubun ,  Luca Grella ,  Xinrong Jiang ,  Daniel Bui ,  Kevin Cummings ,  Christopher Sears ,  Oscar G. Florendo

IPC: H01J37/28 ,  H01J37/00 ,  H01J37/073 ,  H01J37/065 ,  H01J37/14

CPC classification number: H01J37/065 ,  H01J37/073 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/14

Abstract: Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.

公开(公告)号：US20190228944A1

公开(公告)日：2019-07-25

申请号：US15980212

申请日：2018-05-15

Applicant: KLA-TENCOR CORPORATION

Inventor： Sameet K. Shriyan ,  Oscar Florendo ,  Joseph Maurino ,  Daniel Bui

IPC: H01J37/12 ,  H01J37/147

Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.

公开(公告)号：US10340114B1

公开(公告)日：2019-07-02

申请号：US15980212

申请日：2018-05-15

Applicant: KLA-TENCOR CORPORATION

Inventor： Sameet K Shriyan ,  Oscar Florendo ,  Joseph Maurino ,  Daniel Bui

IPC: H01J37/12 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/1472 ,  H01J37/28 ,  H01J2237/1516

Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.