公开(公告)号：US20190228944A1

公开(公告)日：2019-07-25

申请号：US15980212

申请日：2018-05-15

Applicant: KLA-TENCOR CORPORATION

Inventor： Sameet K. Shriyan ,  Oscar Florendo ,  Joseph Maurino ,  Daniel Bui

IPC: H01J37/12 ,  H01J37/147

Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.

公开(公告)号：US10340114B1

公开(公告)日：2019-07-02

申请号：US15980212

申请日：2018-05-15

Applicant: KLA-TENCOR CORPORATION

Inventor： Sameet K Shriyan ,  Oscar Florendo ,  Joseph Maurino ,  Daniel Bui

IPC: H01J37/12 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/1472 ,  H01J37/28 ,  H01J2237/1516

Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.

公开(公告)号：US08957394B2

公开(公告)日：2015-02-17

申请号：US13679072

申请日：2012-11-16

Applicant: KLA-Tencor Corporation

Inventor： Alan D. Brodie ,  Joseph Maurino ,  Mark A. McCord ,  Paul F. Petric

IPC: H01J23/06 ,  H01J23/08 ,  G21K5/08 ,  H01J37/065 ,  H01J29/48

CPC classification number: H01J23/06 ,  G21K5/08 ,  H01J23/08 ,  H01J29/48 ,  H01J29/488 ,  H01J37/065 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/3175

Abstract: One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator 115 stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.

Abstract translation: 一个实施例涉及一种包括具有电阻层的绝缘体支架的高压电子枪。 电阻层至少在绝缘体支架的内表面上。 阴极保持器联接到绝缘体115的一端，并且阳极耦合到另一端。 电阻层有利地增加了用于绝缘体间隔的表面击穿场强，因此能够实现高压电子枪的紧凑设计。 还公开了其它实施例，方面和特征。