公开(公告)号：US20160260576A1

公开(公告)日：2016-09-08

申请号：US15058062

申请日：2016-03-01

Applicant: KLA-Tencor Corporation

Inventor： Christopher Sears ,  Ben Clarke

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/153 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/265 ,  H01J2237/004 ,  H01J2237/153 ,  H01J2237/226

Abstract: A scanning electron microscopy apparatus for mitigating charging artifacts includes a scanning electron microscopy sub-system for acquiring multiple images from a sample. The images include one or more sets of complimentary images. The one or more sets of complimentary images include a first image acquired along a first scan direction and a second image acquired along a second scan direction opposite to the first scan direction. The apparatus includes a controller communicatively coupled to the scanning electron microscopy sub-system. The controller is configured to receive images of the sample from the scanning electron microscopy sub-system. The controller is further configured to generate a composite image by combining the one or more sets of complimentary images.

Abstract translation: 用于减轻充电伪像的扫描电子显微镜装置包括用于从样品获取多个图像的扫描电子显微镜子系统。 图像包括一组或多组互补图像。 一组或多组互补图像包括沿着第一扫描方向获取的第一图像和沿着与第一扫描方向相反的第二扫描方向获取的第二图像。 该装置包括通信地耦合到扫描电子显微镜子系统的控制器。 控制器被配置为从扫描电子显微镜子系统接收样品的图像。 控制器还被配置为通过组合一组或多组互补图像来生成合成图像。

公开(公告)号：US09653257B2

公开(公告)日：2017-05-16

申请号：US15058062

申请日：2016-03-01

Applicant: KLA-Tencor Corporation

Inventor： Christopher Sears ,  Ben Clarke

IPC: H01J37/28 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/265 ,  H01J2237/004 ,  H01J2237/153 ,  H01J2237/226

Abstract: A scanning electron microscopy system for mitigating charging artifacts includes a scanning electron microscopy sub-system for acquiring multiple images from a sample. The images include one or more sets of complementary images. The one or more sets of complementary images include a first image acquired along a first scan direction and a second image acquired along a second scan direction opposite to the first scan direction. The system includes a controller communicatively coupled to the scanning electron microscopy sub-system. The controller is configured to receive images of the sample from the scanning electron microscopy sub-system. The controller is further configured to generate a composite image by combining the one or more sets of complementary images.