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    Dark-Field Inspection Using A Low-Noise Sensor
    1.
    发明申请
    Dark-Field Inspection Using A Low-Noise Sensor 审中-公开
    使用低噪声传感器进行暗场检测

    公开(公告)号：US20170048467A1

    公开(公告)日：2017-02-16

    申请号：US15210056

    申请日：2016-07-14

    申请人： KLA-Tencor Corporation

    发明人： Yung-Ho Alex Chuang ,  David L. Brown ,  Devis Contarato ,  John Fielden ,  Daniel I. Kavaldjiev ,  Guoheng Zhao ,  Jehn-Huar Chern ,  Guowu Zheng ,  Donald W. Pettibone ,  Stephen Biellak

    IPC分类号： H04N5/335 ,  G01N21/95 ,  G06T7/00

    CPC分类号： H04N5/335 ,  G01N21/9501 ,  G01N2021/95676 ,  H04N5/2256 ,  H04N5/347 ,  H04N5/3745 ,  H04N5/3765 ,  H04N5/378

    摘要： An inspection system and methods in which analog image data values (charges) captured by an image sensor are binned (combined) before or while being transmitted as output signals on the image sensor's output sensing nodes (floating diffusions), and in which an ADC is controlled to sequentially generate multiple corresponding digital image data values between each reset of the output sensing nodes. According to an output binning method, the image sensor is driven to sequentially transfer multiple charges onto the output sensing nodes between each reset, and the ADC is controlled to convert the incrementally increasing output signal after each charge is transferred onto the output sensing node. According to a multi-sampling method, multiple charges are vertically or horizontally binned (summed/combined) before being transferred onto the output sensing node, and the ADC samples each corresponding output signal multiple times. The output binning and multi-sampling methods may be combined.

    摘要翻译： 一种检查系统和方法，其中由图像传感器捕获的模拟图像数据值（电荷）在作为图像传感器的输出感测节点（浮动扩散）之间的输出信号被发送之前或同时被分组（组合），并且其中ADC是 被控制以在输出感测节点的每个复位之间顺序地生成多个对应的数字图像数据值。 根据输出合并方法，驱动图像传感器以在每个复位之间顺序地将多个电荷传送到输出感测节点上，并且在每个电荷被传送到输出感测节点之后，控制ADC转换递增增加的输出信号。 根据多采样方法，在转移到输出感测节点之前，将多个电荷垂直或水平分类（相加/组合），并且ADC对每个对应的输出信号进行多次采样。 可以组合输出合并和多采样方法。