公开(公告)号：US10261014B2

公开(公告)日：2019-04-16

申请号：US14583447

申请日：2014-12-26

申请人： KLA-Tencor Corporation

发明人： Noam Sapiens ,  Joel Seligson ,  Vladimir Levinski ,  Daniel Kandel ,  Yoel Feler ,  Barak Bringoltz ,  Amnon Manassen ,  Eliav Benisty

IPC分类号： G01N21/55 ,  G01N21/47 ,  G02B27/56 ,  G02B27/58

摘要： Metrology systems and methods are provided herein, which comprise an optical element that is positioned between an objective lens of the system and a target. The optical element is arranged to enhance evanescent modes of radiation reflected by the target. Various configurations are disclosed: the optical element may comprise a solid immersion lens, a combination of Moiré-elements and solid immersion optics, dielectric-metal-dielectric stacks of different designs, and resonating elements to amplify the evanescent modes of illuminating radiation. The metrology systems and methods are configurable to various metrology types, including imaging and scatterometry methods.

公开(公告)号：US20150198524A1

公开(公告)日：2015-07-16

申请号：US14583447

申请日：2014-12-26

申请人： KLA-Tencor Corporation

发明人： Noam Sapiens ,  Joel Seligson ,  Vladimir Levinski ,  Daniel Kandel ,  Yoel Feler ,  Barak Bringoltz ,  Amnon Manassen ,  Eliav Benisty

IPC分类号： G01N21/47

CPC分类号： G01N21/4788 ,  G01N2201/06113 ,  G02B27/56 ,  G02B27/58

摘要： Metrology systems and methods are provided herein, which comprise an optical element that is positioned between an objective lens of the system and a target. The optical element is arranged to enhance evanescent modes of radiation reflected by the target. Various configurations are disclosed: the optical element may comprise a solid immersion lens, a combination of Moiré-elements and solid immersion optics, dielectric-metal-dielectric stacks of different designs, and resonating elements to amplify the evanescent modes of illuminating radiation. The metrology systems and methods are configurable to various metrology types, including imaging and scatterometry methods.

摘要翻译： 本文提供的计量系统和方法包括位于系统的物镜和目标之间的光学元件。 光学元件布置成增强目标反射的辐射消散模式。 公开了各种配置：光学元件可以包括固体浸没透镜，莫尔元件和固体浸没光学元件的组合，不同设计的介电金属 - 电介质叠层以及用于放大照明辐射的渐逝模式的谐振元件。 计量系统和方法可配置为各种计量类型，包括成像和散射方法。