公开(公告)号：US09422978B2

公开(公告)日：2016-08-23

申请号：US14310632

申请日：2014-06-20

Applicant: KLA-Tencor Corporation

Inventor： Francis C. Chilese ,  Rudy F. Garcia

IPC: F16C32/06 ,  F16J15/40 ,  F16C33/74

CPC classification number: F16C32/0614 ,  F16C32/0685 ,  F16C33/748 ,  F16C2380/18

Abstract: A gas bearing assembly including: a stator, a spindle rotatable about an axis, a first space between the spindle and the stator and arranged to receive a bearing gas at a first pressure, to support rotation of the spindle about the axis, a first annulus, in the stator or the spindle and arranged to vent the bearing gas from a first portion of the first space, a second annulus, in the stator or the spindle, and arranged to transport a barrier gas, at a second pressure, into a second portion of the first space, and a third annulus, in the stator or the spindle, the third annulus disposed between the first and second annuli and arranged to transport the bearing gas and the barrier gas out of a third portion of the space to a create, in the third portion, a third pressure less than the first and second pressures.

Abstract translation: 一种气体轴承组件，包括：定子，可围绕轴线旋转的主轴，所述心轴和所述定子之间的第一空间，并且布置成在第一压力下接收轴承气体，以支撑所述心轴围绕所述轴的旋转;第一环 在定子或主轴中，并布置成从第一空间的第一部分，在定子或主轴中的第二环形空气排出轴承气体，并且布置成在第二压力下将阻挡气体输送到第二压力 所述第一空间的一部分和所述定子或所述心轴中的第三环形空间，所述第三环形空间设置在所述第一和第二环之间，并且被布置成将所述轴承气体和所述阻挡气体从所述空间的第三部分输送到所述空间 在第三部分中，具有小于第一和第二压力的第三压力。

公开(公告)号：US20140376842A1

公开(公告)日：2014-12-25

申请号：US14310632

申请日：2014-06-20

Applicant: KLA-Tencor Corporation

Inventor： Francis C. Chilese ,  Rudy F. Garcia

IPC: F16C32/06

CPC classification number: F16C32/0614 ,  F16C32/0685 ,  F16C33/748 ,  F16C2380/18

Abstract: A gas bearing assembly including: a stator, a spindle rotatable about an axis, a first space between the spindle and the stator and arranged to receive a bearing gas at a first pressure, to support rotation of the spindle about the axis, a first annulus, in the stator or the spindle and arranged to vent the bearing gas from a first portion of the first space, a second annulus, in the stator or the spindle, and arranged to transport a barrier gas, at a second pressure, into a second portion of the first space, and a third annulus, in the stator or the spindle, the third annulus disposed between the first and second annuli and arranged to transport the bearing gas and the barrier gas out of a third portion of the space to a create, in the third portion, a third pressure less than the first and second pressures.

Abstract translation: 一种气体轴承组件，包括：定子，可围绕轴线旋转的主轴，所述心轴和所述定子之间的第一空间，并且布置成在第一压力下接收轴承气体，以支撑所述心轴围绕所述轴的旋转;第一环 在定子或主轴中，并布置成从第一空间的第一部分，在定子或主轴中的第二环形空气排出轴承气体，并且布置成在第二压力下将阻挡气体输送到第二压力 所述第一空间的一部分和所述定子或所述心轴中的第三环形空间，所述第三环形空间设置在所述第一和第二环之间，并且被布置成将所述轴承气体和所述阻挡气体从所述空间的第三部分输送到所述空间 在第三部分中，具有小于第一和第二压力的第三压力。

公开(公告)号：US09389180B2

公开(公告)日：2016-07-12

申请号：US14176587

申请日：2014-02-10

Applicant: KLA-Tencor Corporation

Inventor： Francis C. Chilese ,  John R. Torczynski ,  Rudy Garcia ,  Leonard E. Klebanoff ,  Gildardo R. Delgado ,  Daniel J. Rader ,  Anthony S. Geller ,  Michail A. Gallis

IPC: G01J1/42 ,  G01N21/59 ,  G03F7/20

CPC classification number: G01N21/59 ,  G03F7/70933 ,  G03F7/70983

Abstract: An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or to send light through the second end opening, and C) a source of low pressure gas at a first pressure to flow through the duct, the gas having a high transmission of EUV light, fluidly coupled to the intermediate opening. In addition to or rather than gas flow the apparatus may have A) a low pressure gas with a heat control unit thermally coupled to at least one of the duct and the optical component and/or B) a voltage device to generate voltage between a first portion and a second portion of the duet with a grounded insulative portion therebetween.

Abstract translation: 一种用于极紫外（EUV）光的装置，包括：A）具有第一端开口，第二端开口和中间开口的管道，所述第一端开口位于第二端开口的中间，B）设置成接收EUV光的光学部件 从第二端开口或通过第二端开口发射光，以及C）处于第一压力的低压气体源流过管道，该气体具有高透光率的EUV光，其流体耦合到中间开口 。 除了或不是气体流动之外，装置可以具有A）具有热耦合到管道和光学部件中的至少一个的热控制单元的低压气体和/或B）用于在第一 二重奏部分和第二部分之间具有接地绝缘部分。