公开(公告)号：US09366524B2

公开(公告)日：2016-06-14

申请号：US14481076

申请日：2014-09-09

Applicant: KLA-Tencor Corporation

Inventor： Mark A. McCord ,  Joseph DiRegolo

IPC: G01B11/14 ,  G01B11/06 ,  G01B11/27 ,  G03F9/00

CPC classification number: G01B11/0608 ,  G01B11/27 ,  G03F9/7007 ,  G03F9/7034 ,  G03F9/7069 ,  H01J2237/2482 ,  H01J2237/30438 ,  H01J2237/31774

Abstract: One embodiment relates to a device that senses alignment and height of a work piece. The device may include both an alignment sensor and a height sensor. The alignment sensor generates a first illumination beam that illuminates an alignment mark on the work piece so as to create a first reflected beam, and determines the alignment of the work piece using the first reflected beam. The height sensor generates a second illumination beam that is directed to a surface of the work piece at an oblique angle so as to form a second illumination spot and images the second illumination spot to determine the height of the work piece. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及感测工件的对准和高度的装置。 该装置可以包括对准传感器和高度传感器。 对准传感器产生照亮工件上的对准标记的第一照明光束，以产生第一反射光束，并且使用第一反射光束确定工件的对准。 所述高度传感器产生第二照明光束，所述第二照明光束以斜角指向所述工件的表面，以便形成第二照明光点并且对所述第二照明光斑进行成像以确定所述工件的高度。 还公开了其它实施例，方面和特征。