公开(公告)号：US09934933B1

公开(公告)日：2018-04-03

申请号：US15593900

申请日：2017-05-12

Applicant: KLA-Tencor Corporation

Inventor： Laurence S. Hordon ,  Nikolai Chubun ,  Luca Grella ,  Xinrong Jiang ,  Daniel Bui ,  Kevin Cummings ,  Christopher Sears ,  Oscar G. Florendo

IPC: H01J37/28 ,  H01J37/00 ,  H01J37/073 ,  H01J37/065 ,  H01J37/14

CPC classification number: H01J37/065 ,  H01J37/073 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/14

Abstract: Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.