公开(公告)号：US09934933B1

公开(公告)日：2018-04-03

申请号：US15593900

申请日：2017-05-12

Applicant: KLA-Tencor Corporation

Inventor： Laurence S. Hordon ,  Nikolai Chubun ,  Luca Grella ,  Xinrong Jiang ,  Daniel Bui ,  Kevin Cummings ,  Christopher Sears ,  Oscar G. Florendo

IPC: H01J37/28 ,  H01J37/00 ,  H01J37/073 ,  H01J37/065 ,  H01J37/14

CPC classification number: H01J37/065 ,  H01J37/073 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/14

Abstract: Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.

公开(公告)号：US10964522B2

公开(公告)日：2021-03-30

申请号：US16298755

申请日：2019-03-11

Applicant: KLA-Tencor Corporation

Inventor： Xinrong Jiang ,  Christopher Sears ,  Nikolai Chubun

IPC: H01J37/05 ,  H01J49/48

Abstract: A high-resolution electron energy analyzer is disclosed. In one embodiment, the electron energy analyzer includes an electrostatic lens configured to generate an energy-analyzing field region, decelerate electrons of an electron beam generated by an electron source, and direct the decelerated electrons of the electron beam to the energy-analyzing field region. In another embodiment, the electron energy analyzer includes an electron detector configured to receive one or more electrons passed through the energy-analyzing field region. In another embodiment, the electron detector is further configured to generate one or more signals based on the one or more received electrons.