公开(公告)号：US09778192B2

公开(公告)日：2017-10-03

申请号：US14632486

申请日：2015-02-26

Applicant: KLA-Tencor Corporation

Inventor： Christophe Wouters ,  Steven Boeykens ,  Carl Smets

IPC: G01N21/00 ,  H04N7/18 ,  G01N21/64 ,  G01N21/88 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/958 ,  G01N2201/02 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/06193 ,  G01N2201/062

Abstract: An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.

公开(公告)号：US20150168304A1

公开(公告)日：2015-06-18

申请号：US14632486

申请日：2015-02-26

Applicant: KLA-Tencor Corporation

Inventor： Christophe Wouters ,  Steven Boeykens ,  Carl Smets

IPC: G01N21/64 ,  G01N21/958 ,  G01N21/95

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/958 ,  G01N2201/02 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/06193 ,  G01N2201/062

Abstract: An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.

Abstract translation: 公开了用于透明或半透明物体的背光检查的物体载体，系统和方法。 载体具有带有光致发光性质的载体基层，其在层的顶部承载透明或半透明物体。 透明或半透明物体可以是晶片，物体载体可以是晶片卡盘。 至少一个光源布置在物体载体上方，使得从至少一个光源发射的激发光通过透明或半透明物体被引导到具有光发光性质的层。 由具有光发光性质的层返回的光被物镜收集并由传感器记录。