公开(公告)号：US20190302033A1

公开(公告)日：2019-10-03

申请号：US16443616

申请日：2019-06-17

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01R31/28 ,  G01R31/01 ,  G01R31/26 ,  G01N21/88 ,  G01N21/956

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

公开(公告)号：US20160313257A1

公开(公告)日：2016-10-27

申请号：US15200613

申请日：2016-07-01

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/9505 ,  G01N21/95684 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

Abstract translation: 公开了一种用于工件中的缺陷检测的装置，方法和计算机程序产品。 提供至少一个光源，并且光源产生工件透明的波长范围的照明光。 相机通过镜头将来自工件的至少一个面的光图像到摄像机的检测器上。 工作台用于移动工件并用摄像机对半导体器件的至少一个面进行成像。 该计算机程序产品设置在非暂时的计算机可读介质上，用于工件中的缺陷检测。 计算机用于执行各种处理步骤并控制装置的各种装置。

公开(公告)号：US10324044B2

公开(公告)日：2019-06-18

申请号：US15200613

申请日：2016-07-01

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28 ,  G01N21/88 ,  G01N21/956

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

公开(公告)号：US10935503B2

公开(公告)日：2021-03-02

申请号：US16443616

申请日：2019-06-17

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01N21/88 ,  G01N21/956 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.