公开(公告)号：US20150168847A1

公开(公告)日：2015-06-18

申请号：US14571100

申请日：2014-12-15

Applicant: KLA-Tencor Corporation

Inventor： Richard W. Solarz ,  llya Bezel ,  Anatoly Shchemelinin

IPC: G03F7/20 ,  H01S3/094

CPC classification number: H01S3/094 ,  H01S3/036 ,  H01S3/094042 ,  H01S3/094053 ,  H01S3/0941 ,  H01S3/2207 ,  H01S3/225

Abstract: Disclosed are methods and apparatus for generating a sub-200 nm continuous wave (cw) laser. A laser apparatus includes a chamber for receiving at least a rare gas or rare gas mixtures and a pump laser source for generating at least one cw pump laser focused in the chamber for generating at least one laser-sustained plasma in the chamber. The laser apparatus further includes a system for forming an optical cavity in which the at least one laser-sustained plasma serves as an excitation source for producing at least one cw laser having a wavelength that is below about 200 nm. In one aspect, the at least one laser-sustained plasma has a shape that substantially matches a shape of the optical cavity.

Abstract translation: 公开了用于产生亚200nm连续波（cw）激光的方法和装置。 激光装置包括用于至少接收稀有气体或稀有气体混合物的腔室和用于产生聚集在腔室中的至少一个cw泵激光器的泵激光源，用于在腔室中产生至少一个激光持续等离子体。 激光装置还包括用于形成光腔的系统，其中所述至少一个激光持续等离子体用作用于产生至少一个具有低于约200nm的波长的cw激光的激发源。 在一个方面，所述至少一个激光维持等离子体具有基本上与所述光腔的形状相匹配的形状。