公开(公告)号：US10964856B1

公开(公告)日：2021-03-30

申请号：US16737485

申请日：2020-01-08

Applicant: KNU-INDUSTRY COOPERATION FOUNDATION

Inventor： Jong Hwan Yoon

IPC: H01L33/02 ,  H01L33/50 ,  C23C16/50 ,  C23C16/40 ,  C23C14/14 ,  C23C14/24

Abstract: Disclosed herein is a method of preparing a white light-emitting material. The method of preparing a white light-emitting material includes the steps of: (a) depositing a metal for the formation of a blue light-emitting material on a substrate by performing thermal evaporation; (b) forming a material in which green and blue light-emitting materials are hybridized by placing the substrate, on which the metal film is deposited in step (a), in a plasma-enhanced chemical vapor deposition (PECVD) reactor and exposing the substrate to silicon (Si) and oxygen (O) in a plasma state; and (c) forming a red light-emitting material in the material formed in step (b) by annealing the material formed in step (b) so that the red, green and blue light-emitting materials are hybridized.