公开(公告)号：US09905403B2

公开(公告)日：2018-02-27

申请号：US14427761

申请日：2013-09-10

申请人： KOBELCO RESEARCH INSTITUTE, INC.

发明人： Yuki Tao ,  Moriyoshi Kanamaru ,  Akira Nambu ,  Hideo Hata

IPC分类号： C23C14/06 ,  H01J37/34 ,  C23C14/08

CPC分类号： H01J37/3429 ,  C04B35/453 ,  C04B35/457 ,  C04B2235/3284 ,  C04B2235/3286 ,  C04B2235/3293 ,  C04B2235/604 ,  C04B2235/6562 ,  C04B2235/77 ,  C04B2235/786 ,  C04B2235/80 ,  C23C14/08 ,  C23C14/086 ,  C23C14/3414 ,  H01J37/3426 ,  H01J2237/3322 ,  H01L21/02554 ,  H01L21/02565 ,  H01L21/02631

摘要： An oxide sintered body is obtained by mixing and sintering a zinc oxide, an indium oxide, a gallium oxide and a tin oxide. The oxide sintered body has a relative density of 85% or more, and has volume ratios satisfying the following expressions (1) to (3), respectively, as determined by X•ray diffractometry: (1) (Zn2SnO4 phase+InGaZnO4 phase)/(Zn2SnO4 phase+InGaZnO4 phase+In2O3 phase+SnO2 phase+(ZnO)mIn2O3, phase)≧75% by volume; (2) Zn2SnO4 phase/(Zn2SnO4 phase+InGaZnO4 phase+In2O3 phase+SnO2 phase+(ZnO)mIn2O3 phase)≧30% by volume; and (3) InGaZnO4 phase/(Zn2SnO4 phase+InGaZnO4 phase+In2O3 phase+SnO2 phase+(ZnO)mIn2O3 phase)≧10% by volume, and m represents an integer of 2 to 5.

公开(公告)号：US20150248996A1

公开(公告)日：2015-09-03

申请号：US14427719

申请日：2013-09-10

申请人： KOBELCO RESEARCH INSTITUTE, INC.

发明人： Yuki Tao ,  Hideo Hata ,  Akira Nambu ,  Moriyoshi Kanamaru

IPC分类号： H01J37/34 ,  C23C14/08 ,  C04B35/453 ,  C04B35/64 ,  C04B35/01

CPC分类号： H01J37/3429 ,  C04B35/01 ,  C04B35/453 ,  C04B35/457 ,  C04B35/64 ,  C04B2235/3286 ,  C04B2235/3293 ,  C04B2235/6562 ,  C04B2235/658 ,  C04B2235/66 ,  C04B2235/763 ,  C04B2235/77 ,  C04B2235/786 ,  C04B2235/80 ,  C23C14/08 ,  C23C14/086 ,  C23C14/3414 ,  H01J37/3491 ,  H01L21/02554 ,  H01L21/02565 ,  H01L21/02631

摘要： An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a Zn2SnO4 phase and an InGaZnO4 phase are the main phases and that an InGaZn2O5 phase is contained in an amount of 3 volume % or less.

摘要翻译： 通过混合和烧结氧化锌，氧化铟，氧化镓和氧化锡得到的氧化物烧结体。 氧化物烧结体的相对密度为85％以上，在氧化物烧结体的表面观察到的晶粒的平均粒径小于10μm。 氧化物烧结体的X射线衍射表明Zn2SnO4相和InGaZnO4相为主相，InGaZn 2 O 5相的含量为3体积％以下。

公开(公告)号：US10090136B2

公开(公告)日：2018-10-02

申请号：US14427719

申请日：2013-09-10

申请人： KOBELCO RESEARCH INSTITUTE, INC.

发明人： Yuki Tao ,  Hideo Hata ,  Akira Nambu ,  Moriyoshi Kanamaru

IPC分类号： H01J37/34 ,  C23C14/08 ,  C23C14/34 ,  C04B35/457 ,  C04B35/01 ,  C04B35/453 ,  C04B35/64 ,  H01L21/02

摘要： An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a Zn2SnO4 phase and an InGaZnO4 phase are the main phases and that an InGaZn2O5 phase is contained in an amount of 3 volume % or less.

公开(公告)号：US20150235819A1

公开(公告)日：2015-08-20

申请号：US14427761

申请日：2013-09-10

申请人： KOBELCO RESEARCH INSTITUTE, INC.

发明人： Yuki Tao ,  Moriyoshi Kanamaru ,  Akira Nambu ,  Hideo Hata

IPC分类号： H01J37/34

CPC分类号： H01J37/3429 ,  C04B35/453 ,  C04B35/457 ,  C04B2235/3284 ,  C04B2235/3286 ,  C04B2235/3293 ,  C04B2235/604 ,  C04B2235/6562 ,  C04B2235/77 ,  C04B2235/786 ,  C04B2235/80 ,  C23C14/08 ,  C23C14/086 ,  C23C14/3414 ,  H01J37/3426 ,  H01J2237/3322 ,  H01L21/02554 ,  H01L21/02565 ,  H01L21/02631

摘要： An oxide sintered body is obtained by mixing and sintering a zinc oxide, an indium oxide, a gallium oxide and a tin oxide. The oxide sintered body has a relative density of 85% or more, and has volume ratios satisfying the following expressions (1) to (3), respectively, as determined by X•ray diffractometry: (1) (Zn2SnO4 phase+InGaZnO4 phase)/(Zn2SnO4 phase+InGaZnO4 phase+In2O3 phase+SnO2 phase+(ZnO)mIn2O3, phase)≧75% by volume; (2) Zn2SnO4 phase/(Zn2SnO4 phase+InGaZnO4 phase+In2O3 phase+SnO2 phase+(ZnO)mIn2O3 phase)≧30% by volume; and (3) InGaZnO4 phase/(Zn2SnO4 phase+InGaZnO4 phase+In7O3 phase+SnO2 phase+(ZnO)mIn2O3 phase)≧10% by volume. and m represents an integer of 2 to 5.

摘要翻译： 通过混合并烧结氧化锌，氧化铟，氧化镓和氧化锡得到氧化物烧结体。 氧化物烧结体的相对密度为85％以上，分别通过X射线衍射法测定，满足下述式（1）〜（3）的体积比：（1）（Zn2SnO4相+ InGaZnO4相） /（Zn2SnO4相+ InGaZnO4相+ In2O3相+ Sn​​O2相+（ZnO）mIn2O3，相）≥75体积％ （2）Zn2SnO4相/（Zn2SnO4相+ InGaZnO4相+ In2O3相+ Sn​​O2相+（ZnO）mIn2O3相）≥30体积％ 和（3）InGaZnO 4相/（Zn2SnO4相+InGaZnO4相+ In7O3相+SnO2相+（ZnO）mIn2O3相）≥10体积％。 m表示2〜5的整数。