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公开(公告)号：US20240361685A1
公开(公告)日：2024-10-31
申请号：US18579977
申请日：2022-07-19
发明人： Didier Mathijs Maria Justina Petit , Marcus Antonius Verschuuren , Johannes Balthasar Maria Soetens , Wilhelmus Johannes Everardus Evers , Maurice Leonardus Janssen
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G03F7/70733
摘要： An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a Z-axis direction. Each chuck actuator comprises an actuator output and a lever arrangement between the actuator output and a chuck drive member. The lever arrangement enables an increase in positioning accuracy and increased stiffness, compared to the direct control of position using the actuator output.
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公开(公告)号：US20240337955A1
公开(公告)日：2024-10-10
申请号：US18578753
申请日：2022-07-19
发明人： Didier Mathijs Maria Justina Petit , Johammes Balthasar Maria Soetens , Thomas Petrus Hendricus Warmerdam , Marcus Antonius Verschuuren
IPC分类号： G03F7/00 , B29C59/00 , B29C59/02 , B29K105/00
CPC分类号： G03F7/707 , B29C59/002 , B29C59/02 , G03F7/0002 , G03F7/70775 , G03F7/70783 , G03F7/70875 , B29K2105/0061
摘要： An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck which comprises a hollow cylindrical body having a top face and a bottom face and a lattice arrangement between the top and bottom faces. The chuck has a reduced thermal mass while maintaining the required stiffness for maintaining a uniform imprint gap.
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公开(公告)号：US20240329521A1
公开(公告)日：2024-10-03
申请号：US18580176
申请日：2022-07-19
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G03F7/707 , G03F7/70733 , G03F7/70758
摘要： An imprinting apparatus comprises a first carrier for carrying a flexible stamp having an imprinting pattern and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and an interface plate over the chuck, wherein the interface plate comprises an array of openings for receiving already-imprinted areas of one side of a substrate while an opposite side of the substrate is to be imprinted. The chuck comprises a fluid passage arrangement for coupling to the openings of the array.
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公开(公告)号：US20240329520A1
公开(公告)日：2024-10-03
申请号：US18578763
申请日：2022-07-19
发明人： Didier Mathijs Maria Justina Petit , Johannes Balthasar Maria Soetens , Marcus Antonius Verschuuren , Maurice Leonardus Johannes Janssen
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G03F7/707 , G03F7/70733
摘要： An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The first and second carriers are arranged such that the flexible stamp can be made to contact the substrate. The second carrier comprises a main frame which may be moved (relative to a reference frame) in a Z axis direction by a main actuator, and a chuck with a set of three chuck actuators, each with a stroke smaller than the stroke of the main actuator, for translating a portion of the chuck relative to the main frame in the Z-axis direction. The Z axis movement of the chuck is divided into two stages, with separate long stroke and short stroke drivers. This enables a very stiff support to be created with precise imprint gap control.
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