IMPRINTING APPARATUS
    1.
    发明公开

    公开(公告)号:US20240329521A1

    公开(公告)日:2024-10-03

    申请号:US18580176

    申请日:2022-07-19

    CPC classification number: G03F7/0002 G03F7/707 G03F7/70733 G03F7/70758

    Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp having an imprinting pattern and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and an interface plate over the chuck, wherein the interface plate comprises an array of openings for receiving already-imprinted areas of one side of a substrate while an opposite side of the substrate is to be imprinted. The chuck comprises a fluid passage arrangement for coupling to the openings of the array.

    IMPRINTING APPARATUS
    2.
    发明公开

    公开(公告)号:US20240329520A1

    公开(公告)日:2024-10-03

    申请号:US18578763

    申请日:2022-07-19

    CPC classification number: G03F7/0002 G03F7/707 G03F7/70733

    Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The first and second carriers are arranged such that the flexible stamp can be made to contact the substrate. The second carrier comprises a main frame which may be moved (relative to a reference frame) in a Z axis direction by a main actuator, and a chuck with a set of three chuck actuators, each with a stroke smaller than the stroke of the main actuator, for translating a portion of the chuck relative to the main frame in the Z-axis direction. The Z axis movement of the chuck is divided into two stages, with separate long stroke and short stroke drivers. This enables a very stiff support to be created with precise imprint gap control.

    LED having etched light emitting surface for increased light extraction

    公开(公告)号:US10090437B2

    公开(公告)日:2018-10-02

    申请号:US14762568

    申请日:2014-01-31

    Abstract: The present invention relates to a light emitting device (100) comprising: a substrate (102); a light emitting diode structure (106) arranged on the substrate (102), the diode structure (106) comprising a first semiconducting layer (108), an active region (110) and a second semiconducting layer (112), wherein a light output surface of the diode structure comprises a plurality of protruding surface structures (104) each having a peak height, a sidewall slope (122) and orientation in relation to the substrate, the plurality of protruding structures (104) comprising a first set and a second set of protruding surface structures, the first set and second set of protruding surface structures differing by at least one of the peak height, sidewall slope and orientation in relation to the substrate. The invention also relates to a method for manufacturing a light emitting device where the protruding surface structures are formed by imprint lithography to form a three-dimensional pattern and subsequent etching.

    ENHANCED EMISSION FROM PLASMONIC COUPLED EMITTERS FOR SOLID STATE LIGHTING
    6.
    发明申请
    ENHANCED EMISSION FROM PLASMONIC COUPLED EMITTERS FOR SOLID STATE LIGHTING 有权
    用于固态照明的等离子联轴器的增强排放

    公开(公告)号:US20160190403A1

    公开(公告)日:2016-06-30

    申请号:US14909864

    申请日:2014-07-22

    CPC classification number: H01L33/508 H01L33/504 H01L33/58

    Abstract: There is provided an illumination device (100) comprising an energy source (102) for exciting a photon emitter; a first wavelength conversion layer (104) and a second wavelength conversion layer (106). At least one of the first and second wavelength conversion layer comprises a periodic plasmonic antenna array comprising a plurality of individual antenna elements (108). The wavelength converting medium in the wavelength conversion layer in which the antenna array is arranged comprises photon emitters arranged in close proximity of the plasmonic antenna array such that at least a portion of photons emitted from the wavelength conversion layer are emitted by a coupled system comprising the photon emitter and the plasmonic antenna array. The plasmonic antenna array is configured to support plasmonic-photonic lattice resonances at a frequency range corresponding to the wavelength range of the photon emitter in the layer in which the plasmonic antenna array is arranged, such that light emitted from the plasmonic antenna array has an anisotropic angle distribution.

    Abstract translation: 提供了一种包括用于激发光子发射器的能量源(102)的照明装置(100) 第一波长转换层(104)和第二波长转换层(106)。 第一和第二波长转换层中的至少一个包括包括多个单独天线元件(108)的周期性等离子体激元天线阵列。 布置天线阵列的波长转换层中的波长转换介质包括布置在等离子体激元天线阵列附近的光子发射器,使得从波长转换层发射的光子的至少一部分由耦合系统发射,耦合系统包括 光子发射器和等离子体激元天线阵列。 等离子体激元天线阵列被配置为在等离子体激元天线阵列布置的层中的与光子发射器的波长范围对应的频率范围内支持等离子体 - 光子晶格共振,使得等离子体激元天线阵列发射的光具有各向异性 角度分布。

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