Ultrasound transducer array, probe and system

    公开(公告)号:US11084062B2

    公开(公告)日:2021-08-10

    申请号:US15770605

    申请日:2016-11-02

    IPC分类号: B06B1/02

    摘要: An ultrasound transducer array is provided that comprises a plurality of CMUT (capacitive micromachined ultrasound transducer) cells (100), each CMUT cell comprising a substrate (300) carrying a first electrode (110) of a first electrode arrangement, the substrate being spatially separated from a flexible membrane including a second electrode (120) of a second electrode arrangement by a gap (130), at least one of the first electrode and the second electrode being electrically insulated from said gap by at least one dielectric layer (311, 313), wherein at least one of the first electrode arrangement and the second electrode arrangement is partitioned into a plurality of sections interconnected by respective fuse portions (112, 122). An ultrasound probe and an ultrasound system comprising such an ultrasound transducer array are also disclosed.

    SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES

    公开(公告)号:US20200015784A1

    公开(公告)日:2020-01-16

    申请号:US16471997

    申请日:2017-12-21

    摘要: Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane. In some examples, there is a dielectric stack between the first electrode and the second electrode and flexible membrane. The dielectric stack design minimizes drift in the membrane collapse voltage. In other examples, one of the electrodes is in the form of a ring, and a third electrode is provided to occupy the space in the center of the ring. Alternatively, the first and second electrodes are both in the form of a ring and there is a support between the electrodes inside the rings.