公开(公告)号：US20150364714A1

公开(公告)日：2015-12-17

申请号：US14647121

申请日：2014-01-14

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Bum Ho CHOI ,  Jong Ho LEE

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5225 ,  C23C14/042 ,  C23C14/086 ,  C23C14/584 ,  C23C14/5853 ,  H01L51/0011 ,  H01L51/5206 ,  H01L51/56

Abstract: The present inventions relates to an organic light emitting device capable of decreasing a leakage current, and more particularly, to an organic light emitting device manufacturing method and an organic light emitting device using the same, which can decrease a leakage current, by flattening a lower electrode in order to decrease a leakage current of the lower electrode deposited through a shadow mask.

Abstract translation: 本发明涉及一种能够减少漏电流的有机发光器件，更具体地说，涉及一种有机发光器件制造方法和使用该有机发光器件的有机发光器件，其可以通过使较低的 电极，以减少通过荫罩沉积的下电极的漏电流。

公开(公告)号：US20170056912A1

公开(公告)日：2017-03-02

申请号：US14760227

申请日：2014-12-30

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Bum Ho CHOI ,  Jong Ho LEE

IPC: B05B17/06 ,  B05B9/00

CPC classification number: B05B17/06 ,  B05B9/002 ,  C23C16/4486 ,  C23C16/45561

Abstract: Disclosed is a liquid precursor delivery system that enables a thin film deposition process to be performed at a low temperature like 350° C. or lower in a process of manufacturing semiconductor devices or displays. The liquid precursor delivery system includes an aerosol generator, a vaporizer, and a vapor storage tank. The aerosol generator changes a liquid precursor into an aerosol precursor using ultrasonic vibrations. The vaporizer has a heater block in which a plurality of sloped plate-shaped heaters is arranged in a zigzag form and in which the aerosol precursor changes into a gas precursor by colliding with the heaters and thus obtaining heat energy. The vapor storage tank stores the gas precursor while maintaining a constant pressure and temperature of the gas precursor and delivers the gas precursor to a process chamber when a thin film deposition process is performed.

Abstract translation: 公开了一种液体前体输送系统，其能够在制造半导体器件或显示器的过程中在350℃或更低的低温下进行薄膜沉积工艺。 液体前体输送系统包括气溶胶发生器，蒸发器和蒸汽储存罐。 气溶胶发生器使用超声波振动将液体前体改变成气溶胶前体。 蒸发器具有加热器块，其中多个倾斜的板状加热器以锯齿形布置，并且其中气溶胶前体通过与加热器碰撞而变成气体前体，从而获得热能。 当进行薄膜沉积处理时，蒸汽储存罐储存气体前体，同时保持气体前体的恒定压力和温度，并将气体前体输送到处理室。