公开(公告)号：US09945656B2

公开(公告)日：2018-04-17

申请号：US15518875

申请日：2015-10-05

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Ho Jae Lee ,  Sang Seon Lee

IPC: G01B9/02 ,  G01N21/45 ,  G01B11/24 ,  G01B11/06

CPC classification number: G01B9/02044 ,  G01B11/06 ,  G01B11/0625 ,  G01B11/2441 ,  G01B11/30 ,  G01N21/45 ,  G01N21/8422 ,  G01N2201/068

Abstract: A multi-function spectroscopic device includes a first lens installed in an emission direction of parallel light and focusing the light in a center portion thereof, a second lens disposed to face the first lens and, a reference mirror installed to face the second lens, a beam splitter installed between the first lens and the second lens, a third lens focusing light which moves through the beam splitter onto a measurement object, a fourth lens focusing light which is reflected by the measurement object and reversely moves through the third lens and the beam splitter, a fifth lens converting light which is diffused through a second focus of the fourth lens into parallel light, and a diffraction grating obliquely disposed with respect to a light axis of the fifth lens and diffracting parallel light which moves through the fifth lens and split the parallel light.