公开(公告)号：US20230420584A1

公开(公告)日：2023-12-28

申请号：US17979228

申请日：2022-11-02

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Myung-Jae LEE ,  In-Ho LEE

IPC: H01L31/0236 ,  H01L31/0232 ,  H01L31/107

CPC classification number: H01L31/0236 ,  H01L31/02327 ,  H01L31/107 ,  G01S7/4816

Abstract: A single-photon detection element includes a substrate including a first surface and a second surface located opposite to each other, and a plurality of plasmonic nanopatterns provided on the second surface, wherein the substrate includes a high-concentration doping region provided adjacent to the first surface, a substrate region provided between the high-concentration doping region and the plurality of plasmonic nanopatterns, and a first well provided between the substrate region and the high-concentration doping region.