公开(公告)号：US09753027B2

公开(公告)日：2017-09-05

申请号：US14575129

申请日：2014-12-18

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Kyoseon Hwang ,  Tae Song Kim ,  Rhokyun Kwak ,  Won Woo Cho ,  Myung Sic Chae

IPC: G01N29/00 ,  G01H11/08 ,  H01L41/08 ,  G01N33/53 ,  G01N33/543 ,  G01N29/02 ,  G01N29/036

CPC classification number: G01N33/5302 ,  G01N29/022 ,  G01N29/036 ,  G01N33/54373 ,  G01N33/5438 ,  G01N2291/0427

Abstract: The present disclosure relates to a cantilever sensor, and a biosensor having the same, wherein the cantilever sensor including a slit formed on a flat board and a cantilever formed by the slit, a first electrode formed on the cantilever, and a second electrode formed on the flat board countered to the first electrode about the slit, wherein the electrodes are formed on the cantilever sensor having the slit, whereby sensing can be conducted by an electric method, through which the sensor can be effectively miniaturized.