专利检索 ap:("KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE") AND inv:"Hee Jung Yeom" 第 1 页

1.

发明授权
Device for measuring plasma ion density and apparatus for diagnosing plasma using the same 有权

公开(公告)号：US11735397B2

公开(公告)日：2023-08-22

申请号：US17222937

申请日：2021-04-05

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Hyo Chang Lee , Jung Hyung Kim , Hee Jung Yeom

IPC分类号： H01J37/32

CPC分类号： H01J37/3222 , H01J37/32311 , H01J37/32935 , H01J2237/24585

摘要： Disclosed herein is a device for measuring a plasma ion density, which includes a transceiver antenna configured to apply and receive a microwave, of which a frequency is varied, to and from plasma, and a frequency analyzer configured to analyze a frequency of the microwave received from the transceiver antenna and measure a cut-off frequency, wherein the frequency of the microwave applied to the plasma is varied in the range of 100 kHz to 500 MHz.

2.

发明授权
Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried 有权

公开(公告)号：US11867643B2

公开(公告)日：2024-01-09

申请号：US17050373

申请日：2019-04-15

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Hyo Chang Lee , Jung Hyung Kim , Dae Jin Seong , Hee Jung Yeom

IPC分类号： G01N22/00 , H01J37/32 , H01L21/683 , H01Q1/24 , H01Q1/52 , H01Q9/02 , H01Q21/00 , H01Q21/06

CPC分类号： G01N22/00 , H01J37/3222 , H01J37/32715 , H01J37/32935 , H01L21/6833 , H01Q1/24 , H01Q1/523 , H01Q1/525 , H01Q9/02 , H01Q21/0031 , H01Q21/065 , H01J2237/2007

摘要： The present invention relates to a planar-type plasma diagnosis apparatus comprising: a transmission antenna for applying a frequency-variable microwave to plasma; a reception antenna for receiving the microwave from the plasma; and a body part encompassing the transmission antenna and the reception antenna so that same are insulated from each other, wherein the upper surface of the transmission antenna for applying the microwave and the upper surface of the reception antenna for receiving the microwave are planar, and side surfaces of the upper surfaces of the transmission antenna and the reception antenna face each other.