公开(公告)号：US20230168176A1

公开(公告)日：2023-06-01

申请号：US17763279

申请日：2021-08-10

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Ji Hun MUN ,  Sang Woo KANG

IPC分类号： G01N15/14

CPC分类号： G01N15/1429 ,  G01N2015/1486 ,  G01N2015/1493

摘要： The present invention relates to particle measuring apparatus and a particle measuring method, whereby particle counts per size range can be measured with a high accuracy using a laser power scanning in which lasers of several powers are sequentially irradiated. First, minimum powered lasers capable of measuring particles having more than relevant size are irradiated to a particle measurement space for a predetermined time in response to plural counts of each mutually different particle size, and the counts of particles per size are measured by detecting a scattered light. Furthermore, the counts of particles belonging to each size range can be accurately calculated through an algorithm using the actually measured value.

公开(公告)号：US20180105930A1

公开(公告)日：2018-04-19

申请号：US15562545

申请日：2016-07-28

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Sang Woo KANG ,  Ji Hun MUN

IPC分类号： C23C16/30 ,  C23C16/455 ,  C01G39/06

CPC分类号： C23C16/305 ,  C01B17/20 ,  C01G39/06 ,  C01P2002/82 ,  C01P2002/85 ,  C01P2004/03 ,  C01P2004/04 ,  C23C16/0227 ,  C23C16/45527 ,  C23C16/45553 ,  C23C16/45555 ,  C23C16/52 ,  C30B25/16 ,  C30B25/186 ,  C30B29/46 ,  C30B29/64

摘要： The present invention relates to a method for preparing a two-dimensional transition metal dichalcogenide and, more particularly, to a method for preparing a highly uniform two-dimensional transition metal dichalcogenide thin film. More specifically, the present invention is directed to a preparation method for a highly uniform two-dimensional transition metal dichalcogenide thin film at low temperature of 500° C. or below.