公开(公告)号：US20140230908A1

公开(公告)日：2014-08-21

申请号：US14182752

申请日：2014-02-18

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Hiroto TOKOSHIMA ,  Kazuya ISHIWATA

IPC: F17D1/08

CPC classification number: F17D1/08 ,  C11D7/02 ,  E03C1/00 ,  H01L21/304 ,  H01L21/67017 ,  H01L21/67051 ,  Y10T137/0324 ,  Y10T137/3021 ,  Y10T137/87652

Abstract: A solution having a predetermined concentration is stably supplied to a use point, at which the amount of use of the solution changes, by only modifying currently-used equipment at a low cost and in a space-saving manner. In order to supply a solution containing a solute at a predetermined concentration from a preparation portion of the solution to a use point through a supply pipe, a retention portion that has no gas-liquid interface and at which the solution is retained is provided at an intermediate portion of the supply pipe. Even when the amount of use of the solution at the use point changes, the change is absorbed by the retention portion, whereby a solution having a predetermined concentration can be stably supplied to the use point. Such a retention portion is advantageous in terms of space saving since the retention portion can be formed by using, for example, a long pipe portion or a large-diameter portion of a pipe having no gas-liquid interface. Such a retention portion can be installed in existing equipment at a low cost by only slightly modifying an intermediate portion of a supply pipe.

Abstract translation: 通过仅以较低的成本和节省空间的方式改变当前使用的设备，将具有预定浓度的溶液稳定地供应到使用量变化的使用点。 为了将含有预定浓度的溶质的溶液从溶液的制备部分提供到通过供给管的使用点，在没有气液界面并保留溶液的保留部分设置在 供给管的中间部分。 即使在使用点处的溶液的使用量发生变化的情况下，也能够通过保持部吸收变化，由此能够稳定地向使用点供给具有规定浓度的溶液。 这种保持部在节省空间方面是有利的，因为保持部可以通过使用例如不具有气液界面的管的长管部分或大直径部分形成。 这样的保持部可以仅通过稍微改变供给管的中间部分而以低成本安装在现有设备中。