公开(公告)号：US20150303053A1

公开(公告)日：2015-10-22

申请号：US14439126

申请日：2013-10-10

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Hiroto TOKOSHIMA ,  Hiroshi MORITA

IPC: H01L21/02 ,  C02F1/78

CPC classification number: H01L21/02052 ,  C02F1/20 ,  C02F1/78 ,  C02F2103/346

Abstract: A method for producing ozone gas-dissolved water includes a process in which a mixed gas of an ozone gas and an oxygen gas and degassed water are supplied to an ozone-dissolving section and the mixed gas is dissolved in the degassed water. The amount of the mixed gas supplied to the ozone-dissolving section is controlled such that the sum of the dissolved oxygen gas concentration of the degassed water and the increment of the dissolved oxygen gas concentration calculated from the amount of the oxygen gas in the mixed gas and the amount of the degassed water on the assumption that ozone in the mixed gas entirely decomposes into oxygen is less than or equal to the saturated solubility of the oxygen gas under conditions using the obtained ozone gas-dissolved water.

Abstract translation: 生产臭氧气体溶解水的方法包括将臭氧气体和氧气和脱气水的混合气体供给到臭氧溶解部分并将混合气体溶解在脱气水中的方法。 控制向臭氧溶解部供给的混合气体的量，使得脱气水的溶解氧气体浓度与溶解氧气体浓度的增加量之和由混合气体中的氧气量计算 假定混合气体中的臭氧完全分解为氧气的脱气水的量小于或等于氧气在使用得到的臭氧气体溶解水的条件下的饱和溶解度。

公开(公告)号：US20190233307A1

公开(公告)日：2019-08-01

申请号：US16313245

申请日：2017-03-14

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Yu FUJIMURA ,  Nobuko GAN ,  Hiroto TOKOSHIMA

IPC: C02F1/20 ,  B01D19/00 ,  C02F1/58 ,  C02F1/68 ,  H01L21/02

Abstract: A dilute chemical solution producing apparatus includes, in a supply line of ultrapure water, a platinum group metal carrying resin column, a membrane-type deaeration apparatus, and a gas dissolving membrane apparatus, and a washing chemical solution injection apparatus is provided between the platinum group metal carrying resin column and the membrane-type deaeration apparatus. An inert gas source is connected to a gas phase side of the membrane-type deaeration apparatus, and an inert gas source is also connected to a gas phase side of the gas dissolving membrane apparatus. A discharge line communicates with the gas dissolving membrane apparatus. With such a dilute chemical solution producing apparatus, a dilute chemical solution with both dissolved oxygen and dissolved hydrogen peroxide being removed can be safely produced and supplied in a washing step for semiconductor washing.

公开(公告)号：US20150136705A1

公开(公告)日：2015-05-21

申请号：US14598908

申请日：2015-01-16

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Hiroto TOKOSHIMA ,  Norito IKEMIYA ,  Hideki KOBAYASHI

IPC: C02F1/70 ,  B01J23/42 ,  B01J31/08 ,  C02F1/42

CPC classification number: C02F1/705 ,  B01J23/42 ,  B01J31/08 ,  B01J2231/005 ,  C02F1/20 ,  C02F1/42 ,  C02F2001/422 ,  C02F2101/10 ,  C02F2303/18 ,  C02F2305/00

Abstract: A method for treating drainage containing hydrogen peroxide that has been used for sterilizing and washing an inside of a water treatment system or washing and surface finishing of electronic components includes passing the drainage through the hydrogen peroxide decomposition reactor, injecting effluent water from the hydrogen peroxide decomposition reactor into a side part of the tubular container of the gas-liquid separator, and contacting the drainage with the hydrogen peroxide decomposition catalyst to decompose the hydrogen peroxide in the drainage into oxygen and water, thereby yielding the treated water.

Abstract translation: 一种处理含有过氧化氢的排水方法，用于对水处理系统的内部进行消毒和洗涤，电子部件的洗涤和表面处理包括使排水通过过氧化氢分解反应器，从二氧化碳分解中注入出水 反应器进入气液分离器的管状容器的侧部，并使排水与过氧化氢分解催化剂接触，将排水中的过氧化氢分解成氧和水，从而产生处理过的水。

公开(公告)号：US20140230908A1

公开(公告)日：2014-08-21

申请号：US14182752

申请日：2014-02-18

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Hiroto TOKOSHIMA ,  Kazuya ISHIWATA

IPC: F17D1/08

CPC classification number: F17D1/08 ,  C11D7/02 ,  E03C1/00 ,  H01L21/304 ,  H01L21/67017 ,  H01L21/67051 ,  Y10T137/0324 ,  Y10T137/3021 ,  Y10T137/87652

Abstract: A solution having a predetermined concentration is stably supplied to a use point, at which the amount of use of the solution changes, by only modifying currently-used equipment at a low cost and in a space-saving manner. In order to supply a solution containing a solute at a predetermined concentration from a preparation portion of the solution to a use point through a supply pipe, a retention portion that has no gas-liquid interface and at which the solution is retained is provided at an intermediate portion of the supply pipe. Even when the amount of use of the solution at the use point changes, the change is absorbed by the retention portion, whereby a solution having a predetermined concentration can be stably supplied to the use point. Such a retention portion is advantageous in terms of space saving since the retention portion can be formed by using, for example, a long pipe portion or a large-diameter portion of a pipe having no gas-liquid interface. Such a retention portion can be installed in existing equipment at a low cost by only slightly modifying an intermediate portion of a supply pipe.

Abstract translation: 通过仅以较低的成本和节省空间的方式改变当前使用的设备，将具有预定浓度的溶液稳定地供应到使用量变化的使用点。 为了将含有预定浓度的溶质的溶液从溶液的制备部分提供到通过供给管的使用点，在没有气液界面并保留溶液的保留部分设置在 供给管的中间部分。 即使在使用点处的溶液的使用量发生变化的情况下，也能够通过保持部吸收变化，由此能够稳定地向使用点供给具有规定浓度的溶液。 这种保持部在节省空间方面是有利的，因为保持部可以通过使用例如不具有气液界面的管的长管部分或大直径部分形成。 这样的保持部可以仅通过稍微改变供给管的中间部分而以低成本安装在现有设备中。