公开(公告)号：US20170356891A1

公开(公告)日：2017-12-14

申请号：US15540807

申请日：2016-01-06

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Hiroshi MORITA ,  Yuichi OGAWA ,  Yuya SASAKI

IPC: G01N31/12 ,  B08B3/08 ,  B08B3/14 ,  H01L21/67

CPC classification number: G01N31/12 ,  B08B3/08 ,  B08B3/10 ,  B08B3/12 ,  B08B3/14 ,  H01L21/67017 ,  H01L21/67051 ,  H01L21/67276

Abstract: To measure the concentration of an oxidant in an oxidative cleaning liquid used in a process of cleaning an electronic material in a simple, easy, consistent, and accurate manner without being affected by impurities included in the cleaning liquid, such as metals. A method for measuring the concentration of an oxidant in a sample liquid used as a cleaning liquid in a process of cleaning an electronic material includes decomposing at least part of an oxidant included in the sample liquid by heating or the like; measuring the amount of oxygen gas generated by decomposition of the oxidant; and determining the concentration of the oxidant in the sample liquid on the basis of the amount of the oxygen gas.