公开(公告)号：US20220184571A1

公开(公告)日：2022-06-16

申请号：US17436653

申请日：2020-02-18

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Wataru SUGITA ,  Yuichi OGAWA

IPC: B01F35/22 ,  C11D7/04 ,  C11D11/00 ,  H01L21/67 ,  B01F35/21 ,  B01F23/40 ,  B01F35/71 ,  B01F25/00

Abstract: Dilute chemical solution production device has a plunger pump and a chemical solution supply pipe that supply a chemical solution from a chemical solution reservoir. The end of the chemical solution supply pipe serves as an injection point for the chemical solution. The chemical solution supply pipe is inserted to an approximately central position in the radial direction of an ultrapure water passage, which is a first pipe, via a bore-through joint. Conductivity meter as a conductivity measuring means is provided on the downstream side of the bore-through joint, which serves as the injection point, and is connected to the previously described control means so that the plunger pump can be controlled in accordance with the measured value of the conductivity meter. The dilute chemical solution production device is capable of producing, with a simple structure, a dilute chemical solution having an extremely low concentration of acid/alkali or the like.

公开(公告)号：US20170356891A1

公开(公告)日：2017-12-14

申请号：US15540807

申请日：2016-01-06

Applicant: KURITA WATER INDUSTRIES LTD.

Inventor： Hiroshi MORITA ,  Yuichi OGAWA ,  Yuya SASAKI

IPC: G01N31/12 ,  B08B3/08 ,  B08B3/14 ,  H01L21/67

CPC classification number: G01N31/12 ,  B08B3/08 ,  B08B3/10 ,  B08B3/12 ,  B08B3/14 ,  H01L21/67017 ,  H01L21/67051 ,  H01L21/67276

Abstract: To measure the concentration of an oxidant in an oxidative cleaning liquid used in a process of cleaning an electronic material in a simple, easy, consistent, and accurate manner without being affected by impurities included in the cleaning liquid, such as metals. A method for measuring the concentration of an oxidant in a sample liquid used as a cleaning liquid in a process of cleaning an electronic material includes decomposing at least part of an oxidant included in the sample liquid by heating or the like; measuring the amount of oxygen gas generated by decomposition of the oxidant; and determining the concentration of the oxidant in the sample liquid on the basis of the amount of the oxygen gas.