公开(公告)号：US20120156108A1

公开(公告)日：2012-06-21

申请号：US13404700

申请日：2012-02-24

申请人： KYLE FONDURULIA ,  Eric Shero ,  Mohith E. Verghese ,  Carl L. White

发明人： KYLE FONDURULIA ,  Eric Shero ,  Mohith E. Verghese ,  Carl L. White

IPC分类号： B01J8/00 ,  B01D35/00

CPC分类号： C23C16/4481 ,  C23C16/4401 ,  C23C16/4402

摘要： A precursor source vessel comprises a vessel body, a passage within the vessel body, and a valve attached to a surface of the body. An internal chamber is adapted to contain a chemical reactant, and the passage extends from outside the body to the chamber. The valve regulates flow through the passage. The vessel has inlet and outlet valves, and optionally a vent valve for venting internal gas. An external gas panel can include at least one valve fluidly interposed between the outlet valve and a substrate reaction chamber. Gas panel valves can each be positioned along a plane that is generally parallel to, and no more than about 10.0 cm from, a flat surface of the vessel. Filters in a vessel lid or wall filter gas flow through the vessel's valves. A quick-connection assembly allows fast and easy connection of the vessel to a gas panel.