公开(公告)号：US10920318B2

公开(公告)日：2021-02-16

申请号：US15771525

申请日：2016-10-27

Applicant: KYOCERA CORPORATION

Inventor： Yukio Noguchi ,  Yuuji Kawase ,  Hiromasa Matsufuji ,  Kouji Teramoto

IPC: C23C16/455 ,  C04B37/00 ,  C04B35/626 ,  B28B11/12 ,  C04B35/111 ,  B28B11/24 ,  C04B35/117 ,  C04B35/64 ,  H01L21/67

Abstract: A shower plate according to the present disclosure includes a ceramic sintered body, the ceramic sintered body comprising a first surface, a second surface facing the first surface, and a through hole positioned between the first surface and the second surface. An inner surface of the through hole includes a protruding crystal grain which protrudes more than an exposed part of a grain boundary phase existing between crystal grains. In addition, a semiconductor manufacturing apparatus according to the present disclosure includes the shower plate mentioned above.

公开(公告)号：US20150122464A1

公开(公告)日：2015-05-07

申请号：US14403848

申请日：2013-05-21

Applicant: KYOCERA Corporation

Inventor： Kou Ito ,  Kouji Teramoto ,  Hiroyasu Momikura

IPC: F28F21/04 ,  F28F13/12 ,  F28D15/00

CPC classification number: F28F21/04 ,  F28D15/00 ,  F28D2021/0028 ,  F28F7/02 ,  F28F13/12 ,  F28F2255/18 ,  H01L21/67109 ,  H01L21/6838

Abstract: A flow path member 1 according to one aspect of the invention includes a main body 4 formed of a ceramic sintered body in which a first flow path 6 is provided so as to allow a fluid to flow therethrough, wherein the main body 4 includes a projection 10 formed of part of the ceramic sintered body on an inner wall of the first flow path 6. An adsorption device according to one aspect of the invention includes the flow path member 1 that adsorbs a workpiece 2 and a fluid supplying unit that supplies a fluid to the first flow path 6 of the flow path member 1. A cooling device according to one aspect of the invention includes the flow path member 1 that cools an object and a fluid supplying unit that supplies a fluid which is a cooling fluid to the first flow path 6 of the flow path member 1.

Abstract translation: 根据本发明的一个方面的流路构件1包括由陶瓷烧结体形成的主体4，其中第一流路6设置成允许流体流过其中，其中主体4包括突起 10由陶瓷烧结体的一部分形成在第一流道6的内壁上。根据本发明的一个方面的吸附装置包括吸附工件2的流路构件1和供给流体的流体供给单元 到流路构件1的第一流路6.根据本发明的一个方面的冷却装置包括冷却物体的流路构件1和将作为冷却流体的流体供给到第一流体的流体供给单元 流路构件1的流路6。

公开(公告)号：US11999660B2

公开(公告)日：2024-06-04

申请号：US16643143

申请日：2018-08-29

Applicant: KYOCERA Corporation

Inventor： Kouji Teramoto

IPC: C04B37/00

CPC classification number: C04B37/003 ,  C04B2237/064 ,  C04B2237/343 ,  C04B2237/765 ,  C04B2237/78 ,  Y10T428/192

Abstract: A ceramic joined body includes a first aluminum oxide-based sintered body, a second aluminum oxide-based sintered body, an aluminum oxide-based joint layer located between the first aluminum oxide-based sintered body and the second aluminum oxide-based sintered body, and an aluminum oxide-based protrusion connected to the aluminum oxide-based joint layer, where the average diameter for closed pores of the aluminum oxide-based projection is 0.8 times or more and 1.5 times or less as large as the average diameter for closed pores for each of the first aluminum oxide-based sintered body and the second aluminum oxide-based sintered body.

公开(公告)号：US10480873B2

公开(公告)日：2019-11-19

申请号：US14403848

申请日：2013-05-21

Applicant: KYOCERA Corporation

Inventor： Kou Ito ,  Kouji Teramoto ,  Hiroyasu Momikura

IPC: F28F13/12 ,  F28D15/00 ,  F28F21/04

Abstract: A flow path member 1 according to one aspect of the invention includes a main body 4 formed of a ceramic sintered body in which a first flow path 6 is provided so as to allow a fluid to flow therethrough, wherein the main body 4 includes a projection 10 formed of part of the ceramic sintered body on an inner wall of the first flow path 6.