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公开(公告)号：US20210102864A1
公开(公告)日：2021-04-08
申请号：US17039878
申请日：2020-09-30
发明人： Michitaka OKUTA , Yuki SAITO , Toshinaga TAKEYA , Shou HARAKO , Jukiya FUKUSHI , Minoru SATO , Hisao NARITA
摘要： An optical probe receives an optical signal output from a test subject. The optical probe includes an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion, wherein an incident surface of the optical waveguide, which receives the optical signal, is a convex spherical surface with a constant curvature radius.
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公开(公告)号：US20220221502A1
公开(公告)日：2022-07-14
申请号：US17608118
申请日：2020-04-03
发明人： Minoru SATO
摘要： A connecting device for inspection includes a probe head (30) configured to hold electric contacts (10) and optical contacts (20) such that tip ends of the respective contacts are exposed on a lower surface of the probe head (30), and a transformer (40) including connecting wires (41) arranged therein and optical wires (42) penetrating therethrough. The respective proximal ends of the electric contacts (10) and the optical contacts (20) are exposed on an upper surface of the probe head (30), and tip ends on one side of the connecting wires (41) electrically connected to the proximal ends of the electric contacts (10) and connecting ends of the optical wires (42) optically connected to the proximal ends of the optical contacts (20) are arranged in a lower surface of the transformer (40). A positional relationship between the tip end of the respective electric contacts (10) and the tip end of the respective optical contacts (20) on the lower surface of the probe head (30) corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device.
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公开(公告)号：US20220214391A1
公开(公告)日：2022-07-07
申请号：US17604319
申请日：2020-04-03
发明人： Minoru SATO
摘要： A connecting device for inspection includes a probe head (30) configured to hold electric contacts (10) and optical contacts (20) such that tip ends of the respective contacts are exposed on a lower surface of the probe head (30) while proximal ends of the electric contacts (10) are exposed on an upper surface of the probe head and the optical contacts (20) are fixed to the probe head (30), and a transformer (40) including connecting wires (41) provided therein such that tip ends on one side of the connecting wires (41) electrically connected to the proximal ends of the electric contacts (10) exposed on the upper surface of the probe head (30) are arranged in a lower surface of the transformer (40) while the optical contacts (20) slidably penetrate the transformer (40). A positional relationship between the tip end of the respective electric contacts (10) and the tip end of the respective optical contacts (20) on the lower surface of the probe head (30) corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device. The optical contacts (20) continuously penetrate the probe head (30) and the transformer (40).
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公开(公告)号：US20220034821A1
公开(公告)日：2022-02-03
申请号：US17392214
申请日：2021-08-02
发明人： Minoru SATO
摘要： A connecting device for inspection includes optical probes, and a probe head including a plurality of guide plates. The probe head includes a first guide plate, and a second guide plate arranged movably with respect to the first guide plate in a radial direction of the penetration holes in a state in which the optical probes are inserted to the respective penetration holes. The probe head holds the optical probes by inner wall surfaces of the penetration holes of the first guide plate and inner wall surfaces of the penetration holes of the second guide plate in a state in which the positions of the central axes of the penetration holes of the first guide plate are shifted in the radial direction from the positions of the central axes of the penetration holes of the second guide plate.
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公开(公告)号：US20130265074A1
公开(公告)日：2013-10-10
申请号：US13836387
申请日：2013-03-15
发明人： Minoru SATO
IPC分类号： G01R1/067
CPC分类号： G01R1/06711 , G01R1/06716 , G01R1/06733 , G01R1/06738 , G01R1/07357
摘要： A probe is provided with a linear main body portion having a tip in contact with an electrode of a member to be tested in a state where a board-side end is in contact with the circuit board side of a probe card. An elastic support portion is provided on a board-side end portion of the main body portion and elastically supports the main body portion on the probe card side. The support portion has its base end side integrally fixed to the board-side end portion and is formed with the distal end side directed toward the tip portion of the main body portion and curved having an arc shape toward the main body portion side. Two pieces of the support portion are provided symmetrically on both sides sandwiching the board-side end portion and are configured by being curved, each having an arc shape with the same radius of curvature.
摘要翻译： 探针设置有在基板侧端部与探针卡的电路板侧接触的状态下具有与待测试部件的电极接触的尖端的线状主体部。 弹性支撑部分设置在主体部分的板侧端部上，弹性支撑探针卡侧的主体部分。 支撑部的基端侧一体地固定在基板侧端部，形成有朝向主体部的前端部的前端侧，并且朝向主体部侧弯曲成弧形。 两个支撑部分对称地设置在夹着板侧端部的两侧上，并且通过弯曲构造，每个具有具有相同曲率半径的弧形。
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