公开(公告)号：US20150168841A1

公开(公告)日：2015-06-18

申请号：US14193410

申请日：2014-02-28

申请人： Kabushiki Kaisha Toshiba

发明人： Kentaro MATSUNAGA ,  Masashi Terao ,  Eiji Yoneda

IPC分类号： G03F7/20

CPC分类号： G03F7/2024 ,  G03F7/0002

摘要： According to one embodiment, first a guide pattern is formed above an object to processing, and then surface modification is performed on the guide pattern. Then a solution including a block copolymer is coated over the object to processing having the guide pattern formed thereon, and the block copolymer is made to phase separate over the object to processing. Subsequently, one component of the phase-separated block copolymer is removed by development. And with the guide pattern coated with other component of the block copolymer as a mask, the object to processing is patterned.

摘要翻译： 根据一个实施例，首先在物体上形成引导图案以进行处理，然后对引导图案进行表面修饰。 然后将包含嵌段共聚物的溶液涂覆在物体上，形成有引导图案的处理，并使嵌段共聚物在物体上相分离以进行处理。 随后，通过显影除去相分离的嵌段共聚物的一种组分。 并且，用嵌段共聚物的其他成分涂布的引导图案作为掩模，对加工对象进行图案化。

公开(公告)号：US09465295B2

公开(公告)日：2016-10-11

申请号：US14193410

申请日：2014-02-28

申请人： Kabushiki Kaisha Toshiba

发明人： Kentaro Matsunaga ,  Masashi Terao ,  Eiji Yoneda

IPC分类号： H01L21/033 ,  G03F7/20 ,  G03F7/00

CPC分类号： G03F7/2024 ,  G03F7/0002

摘要： According to one embodiment, first a guide pattern is formed above an object to processing, and then surface modification is performed on the guide pattern. Then a solution including a block copolymer is coated over the object to processing having the guide pattern formed thereon, and the block copolymer is made to phase separate over the object to processing. Subsequently, one component of the phase-separated block copolymer is removed by development. And with the guide pattern coated with other component of the block copolymer as a mask, the object to processing is patterned.

摘要翻译： 根据一个实施例，首先在物体上形成引导图案以进行处理，然后对引导图案进行表面修饰。 然后将包含嵌段共聚物的溶液涂覆在物体上，形成有引导图案的处理，并使嵌段共聚物在物体上相分离以进行处理。 随后，通过显影除去相分离的嵌段共聚物的一种组分。 并且，用嵌段共聚物的其他成分涂布的引导图案作为掩模，对加工对象进行图案化。