摘要:
The present invention provides a new class of organic/inorganic hybrid materials having [ER]n rings interconnected by E′ atoms. In an embodiment a class of materials called high organic group content periodic mesoporous organosilicas (HO-PMO's) with [SiR]3 rings interconnected by O atoms is described. The measured dielectric, mechanical and thermal properties of the materials suggest that an increased organic content achieved by the [SiR]3 rings of a high organic group content periodic mesoporous organosilica leads to superior materials properties potentially useful for a wide range of applications including microelectronics, separation, catalysis, sensing, optics or electronic printing.
摘要:
This invention relates to a chemical transformation of the bridging organic groups in metal oxide materials containing bridging organic groups, such as bridged organosilicas, wherein such a transformation greatly benefits properties for low dielectric constant (k) applications. A thermal treatment at specific temperatures is shown to cause a transformation of the organic groups from a bridging to a terminal configuration, which consumes polar hydroxyl groups. The transformation causes k to decrease, and the hydrophobicity to increase (through ‘self-hydrophobization’). As a result of the bridge-terminal transformation, porous organosilica films are shown to have k 6 GPa, do not require additional chemical surface treatment for dehydroxylation (hydrophobicity).