Method of transformation of bridging organic groups in organosilica materials
    2.
    发明申请
    Method of transformation of bridging organic groups in organosilica materials 审中-公开
    有机硅材料中桥连有机基团的转化方法

    公开(公告)号:US20090130412A1

    公开(公告)日:2009-05-21

    申请号:US11921325

    申请日:2005-09-22

    CPC分类号: B01J29/0308

    摘要: This invention relates to a chemical transformation of the bridging organic groups in metal oxide materials containing bridging organic groups, such as bridged organosilicas, wherein such a transformation greatly benefits properties for low dielectric constant (k) applications. A thermal treatment at specific temperatures is shown to cause a transformation of the organic groups from a bridging to a terminal configuration, which consumes polar hydroxyl groups. The transformation causes k to decrease, and the hydrophobicity to increase (through ‘self-hydrophobization’). As a result of the bridge-terminal transformation, porous organosilica films are shown to have k 6 GPa, do not require additional chemical surface treatment for dehydroxylation (hydrophobicity).

    摘要翻译: 本发明涉及桥接有机基团在含有桥连有机基团的金属氧化物材料中的化学转化,其中这种转变大大有利于低介电常数(k)应用的性能。 显示在特定温度下的热处理会引起有机基团从桥连转变为端基构型,其消耗极性羟基。 转化导致k降低,疏水性增加(通过“自我疏水化”)。 由于桥端转化,多孔有机硅膜显示为k <2.0,E> 6 GPa,不需要额外的化学表面处理脱羟基(疏水性)。