摘要:
The present invention provides a new class of organic/inorganic hybrid materials having [ER]n rings interconnected by E′ atoms. In an embodiment a class of materials called high organic group content periodic mesoporous organosilicas (HO-PMO's) with [SiR]3 rings interconnected by O atoms is described. The measured dielectric, mechanical and thermal properties of the materials suggest that an increased organic content achieved by the [SiR]3 rings of a high organic group content periodic mesoporous organosilica leads to superior materials properties potentially useful for a wide range of applications including microelectronics, separation, catalysis, sensing, optics or electronic printing.
摘要:
This invention relates to a chemical transformation of the bridging organic groups in metal oxide materials containing bridging organic groups, such as bridged organosilicas, wherein such a transformation greatly benefits properties for low dielectric constant (k) applications. A thermal treatment at specific temperatures is shown to cause a transformation of the organic groups from a bridging to a terminal configuration, which consumes polar hydroxyl groups. The transformation causes k to decrease, and the hydrophobicity to increase (through ‘self-hydrophobization’). As a result of the bridge-terminal transformation, porous organosilica films are shown to have k 6 GPa, do not require additional chemical surface treatment for dehydroxylation (hydrophobicity).
摘要:
The present invention provides a new class of organic/inorganic hybrid materials having [ER]n rings interconnected by E′ atoms. In an embodiment a class of materials called high organic group content periodic mesoporous organosilicas (HO-PMO's) with [SiR]3 rings interconnected by O atoms is described. The measured dielectric, mechanical and thermal properties of the materials suggest that an increased organic content achieved by the [SiR]3 rings of a high organic group content periodic mesoporous organosilica leads to superior materials properties potentially useful for a wide range of applications including microelectronics, separation, catalysis, sensing, optics or electronic printing.
摘要翻译:本发明提供了一类新的有机/无机混合材料,其具有由E'原子相互连接的[ER] N n环。 在一个实施方案中,描述了称为高有机基团含量的周期性介孔有机硅(HO-PMO)的一类具有由O原子互连的[SiR 3] 3环的材料。 材料的测量电介质,机械和热性能表明,通过高有机基团含量的周期性介孔有机二氧化硅的[SiR] 3 N 3环实现的增加的有机含量导致优异的材料性质对于 广泛的应用,包括微电子学,分离,催化,感测,光学或电子印刷。