Automated repetitive array microstructure defect inspection

    公开(公告)号:US07065239B2

    公开(公告)日:2006-06-20

    申请号:US09682850

    申请日:2001-10-24

    IPC分类号: G06K9/00

    CPC分类号: G06T7/0004 G06T2207/30148

    摘要: A method and system for defect inspection of microfabricated structures such as semiconductor wafers, masks or reticles for micro-fabrication, flat panel displays, micro-electro-mechanical (MEMs) having repetitive array regions such as memories or pixels. In one embodiment a method of inspection of microfabricated structures includes the steps of acquiring contrast data or images from the microfabricated structures, analyzing automatically the contrast data or images to find repetitive regions of the contrast data and comparing the repetitive regions of the contrast data with reference data to detect defects in the microfabricated structures. In the analyzing step, a cell-metric such as the range, or mean or other statistical or mathematical measure of the contrast data is used to find the repetitive regions. Image or contrast data acquisition can be performed with an optical, e-beam or other microscope suited for microfabricated structures.

    Electric vehicle using the vehicle's kinetic and mechanical power to
regenerate it's energy storage device
    2.
    发明授权
    Electric vehicle using the vehicle's kinetic and mechanical power to regenerate it's energy storage device 失效
    电动汽车使用车辆的动力和机械动力再生能量储存装置

    公开(公告)号:US4597463A

    公开(公告)日:1986-07-01

    申请号:US573034

    申请日:1984-01-23

    申请人: Richard Barnard

    发明人: Richard Barnard

    摘要: An electric vehicle with combustible fuel capability having an electrocombustible drive engine. A first and second storage battery having a D.C. voltage capacity can be spread to a chopper which provides the input voltage to the electro portion of the engine. A controller accessible to the operator of the vehicle determines the quantity of voltage. A 1st clutch is designed so it can connect or disconnect a 1st flywheel to the motorshaft, connect or disconnect a 1st generator to the motorshaft if its not operated off the first flywheel, and connect or disconnect the 1st generator to the 1st flywheel if it is desired to operate the 1st generator off the 1st flywheel when the flywheel is not connected to the motor shaft and is operating off its stored kinetic and mechanical power. A second generator would be operated from a fan which would be a velocity dependent part of the vehicle. A 3rd generator would operate similar to the 1st generator except it would be connected to the velocity dependent rear axle of the vehicle. A 4th and 5th generator would be operated off individual kinetic, mechanical storage devices that have stored power by means of rubberbands or springs. A 1st and 2nd torque release devices can disconnect the 1st and 2nd kinetic, mechanical storage devices from the 1st and 2nd flywheel or a velocity dependent portion of the vehicle.

    摘要翻译: 具有可燃燃料能力的电动车辆具有可燃的驱动发动机。 具有直流电压容量的第一和第二蓄电池可以扩展到向发动机的电气部分提供输入电压的斩波器。 车辆操作人员可以访问的控制器确定电压的数量。 第一离合器被设计成可以将第一飞轮连接或断开到电动机轴,如果第一发电机没有从第一飞轮上操作,则将第一发电机连接或断开到发动机轴,并且如果是第一飞轮,则将第一发电机连接或断开到第一飞轮 当飞轮未连接到电机轴上并运行其存储的动力和机械功率时,希望将第一发电机从第一飞轮上操作。 第二发电机将从作为车辆的速度依赖部分的风扇操作。 第三发电机将类似于第一发电机操作,除了它将连接到车辆的与速度相关的后轴。 第4和第5发电机将通过橡胶带或弹簧储存动力的单个动力学机械存储装置运行。 第一和第二扭矩释放装置可以将第一和第二动力机械存储装置与第一和第二飞轮或车辆的速度相关部分断开。

    Beam automation in charged-particle-beam systems
    3.
    发明授权
    Beam automation in charged-particle-beam systems 有权
    带束粒子束系统中的束自动化

    公开(公告)号:US06476398B1

    公开(公告)日:2002-11-05

    申请号:US09514080

    申请日:2000-02-26

    申请人: Li Xu Richard Barnard

    发明人: Li Xu Richard Barnard

    IPC分类号: G21K108

    摘要: Embodiments in accordance with the invention provide respectively for auto-focus, auto-contrast, and auto-correction of astigmatism in both x and y directions, are independent of focus-induced-image-rotation, sample feature orientation and image deformation, and focus-induced-image magnification change, and are insensitive to various kinds of noise. Poor image contrast is handled by an auto-contrast capability. Embodiments in accordance with the invention can achieve high reliability and repeatability, while providing for faster operation than most prior-art methods.

    摘要翻译: 根据本发明的实施例分别提供了在x和y方向上的像散的自动聚焦,自动对比度和自动校正,独立于聚焦感应图像旋转,样本特征取向和图像变形以及焦点 诱导图像放大变化,并且对各种噪声不敏感。 较差的图像对比度由自动对比度处理。 根据本发明的实施例可以实现高可靠性和重复性,同时提供比大多数现有技术方法更快的操作。

    Dryer insert, holder, container
    4.
    发明授权
    Dryer insert, holder, container 失效
    干燥机插件,支架,容器

    公开(公告)号:US4617743A

    公开(公告)日:1986-10-21

    申请号:US695843

    申请日:1985-01-28

    申请人: Richard Barnard

    发明人: Richard Barnard

    IPC分类号: F26B25/14 F26B11/04

    CPC分类号: F26B25/14

    摘要: An article holding container for a rotary drum dryer comprised of a compartment for holding hosiery, tennis shoes, etc. The compartment is separated into multiple chambers by divider insert means. The compartment is secured inside the drum by an expandable rod with skid resistant means at the ends thereof.

    摘要翻译: 一种用于旋转滚筒式干燥机的物品保持容器,包括用于保持袜子,网球鞋等的隔间。隔室通过分隔器插入装置分离成多个室。 隔室通过可伸缩的杆在其滚筒内固定,在其端部具有防滑装置。