公开(公告)号：US20090134340A1

公开(公告)日：2009-05-28

申请号：US12273805

申请日：2008-11-19

申请人： Kanji FURUHASHI ,  Shuji Kikuchi ,  Akira Karakama ,  Yasuhiro Gunji

发明人： Kanji FURUHASHI ,  Shuji Kikuchi ,  Akira Karakama ,  Yasuhiro Gunji

IPC分类号： H01J3/14

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/2817

摘要： The present invention has a subject to provide an apparatus that optimizes scanning in accordance with circumstances or purposes, reduces distortion of images, and improves throughput, image quality, and defect detection rate by controlling deflection of a charged particle beam in a stage tracking system. To solve this subject, an apparatus according to the present invention is an inspection apparatus for detecting abnormal conditions of an inspection target by irradiating the inspection target with the charged particle beam and detecting generated secondary electrons, including both a stage that moves continuously with the inspection target placed thereon and a deflection control circuit for providing a deflector with a scanning signal that causes the charged particle beam to scan repeatedly in a direction substantially perpendicular to a stage movement axis direction while the charged particle beam being deflected in the stage movement axis direction in accordance with a change in movement speed of the stage during movement of the stage.

摘要翻译： 本发明提供一种根据情况或目的优化扫描的装置，减少图像的失真，并且通过控制在舞台跟踪系统中的带电粒子束的偏转来提高吞吐量，图像质量和缺陷检测率。 为了解决这个问题，根据本发明的装置是一种检查装置，用于通过用带电粒子束照射检查对象并检测产生的二次电子来检测检查对象的异常状况，包括两个检查阶段连续移动的阶段 目标物放置在其上，以及偏转控制电路，用于向偏转器提供扫描信号，该扫描信号使得带电粒子束在基本上垂直于载物台移动轴线方向的方向上反复扫描，同时带电粒子束在载物台移动轴线方向上偏转 根据舞台运动中舞台的移动速度的变化。

公开(公告)号：US08168950B2

公开(公告)日：2012-05-01

申请号：US12273805

申请日：2008-11-19

申请人： Kanji Furuhashi ,  Shuji Kikuchi ,  Akira Karakama ,  Yasuhiro Gunji

发明人： Kanji Furuhashi ,  Shuji Kikuchi ,  Akira Karakama ,  Yasuhiro Gunji

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/2817

摘要： The present invention has a subject to provide an apparatus that optimizes scanning in accordance with circumstances or purposes, reduces distortion of images, and improves throughput, image quality, and defect detection rate by controlling deflection of a charged particle beam in a stage tracking system. To solve this subject, an apparatus according to the present invention is an inspection apparatus for detecting abnormal conditions of an inspection target by irradiating the inspection target with the charged particle beam and detecting generated secondary electrons, including both a stage that moves continuously with the inspection target placed thereon and a deflection control circuit for providing a deflector with a scanning signal that causes the charged particle beam to scan repeatedly in a direction substantially perpendicular to a stage movement axis direction while the charged particle beam being deflected in the stage movement axis direction in accordance with a change in movement speed of the stage during movement of the stage.

摘要翻译： 本发明提供一种根据情况或目的优化扫描的装置，减少图像的失真，并且通过控制在舞台跟踪系统中的带电粒子束的偏转来提高吞吐量，图像质量和缺陷检测率。 为了解决这个问题，根据本发明的装置是一种检查装置，用于通过用带电粒子束照射检查对象并检测产生的二次电子来检测检查对象的异常状况，包括两个检查阶段连续移动的阶段 目标物放置在其上，以及偏转控制电路，用于向偏转器提供扫描信号，该扫描信号使得带电粒子束在基本上垂直于载物台移动轴线方向的方向上反复扫描，同时带电粒子束在载物台移动轴线方向上偏转 根据舞台运动中舞台的移动速度的变化。

公开(公告)号：US20070024643A1

公开(公告)日：2007-02-01

申请号：US11482089

申请日：2006-07-07

申请人： Hidemitsu Naya ,  Takuya Shirato ,  Akira Karakama

发明人： Hidemitsu Naya ,  Takuya Shirato ,  Akira Karakama

IPC分类号： G09G5/00

CPC分类号： G06F3/1454 ,  G09G5/001 ,  H01J2237/2817 ,  Y10S345/96

摘要： An inspected image can be communicated without putting large load on a network. A remote console enables an operation screen and a moving image to be displayed and processed without color shifts. Information on the operation screen is not communicated as bitmap information, but event information such as a formation of a window and the moving of a mouse is communicated as information at a level of I parts of graphical user interface. Moreover, communication of the event information on the operation screen and communication of a moving image are separated. In addition, a method of compressing information on the operation screen and a method of compressing information on the moving image are separated. A necessary part of information on the moving image is selected and communicated depending on the state of the semiconductor inspection apparatus, an operation of an operator, and a pattern to be inspected.

摘要翻译： 可以在不对网络造成巨大负担的情况下传送被检查的图像。 远程控制台使操作屏幕和运动图像能够显示和处理，而无需颜色偏移。 操作屏幕上的信息不作为位图信息传送，但是诸如窗口的形成和鼠标的移动的事件信息作为图形用户界面的I部分的级别的信息被传送。 此外，操作画面上的事件信息和运动图像的通信的通信被分离。 此外，分离了在操作画面上压缩信息的方法和压缩关于运动图像的信息的方法。 根据半导体检查装置的状态，操作者的操作以及待检查的图案来选择和传送关于运动图像的信息的必要部分。

公开(公告)号：US07916926B2

公开(公告)日：2011-03-29

申请号：US11482089

申请日：2006-07-07

申请人： Hidemitsu Naya ,  Takuya Shirato ,  Akira Karakama

发明人： Hidemitsu Naya ,  Takuya Shirato ,  Akira Karakama

IPC分类号： G09G5/00

CPC分类号： G06F3/1454 ,  G09G5/001 ,  H01J2237/2817 ,  Y10S345/96

摘要： An inspected image can be communicated without putting large load on a network. A remote console enables an operation screen and a moving image to be displayed and processed without color shifts. Information on the operation screen is not communicated as bitmap information, but event information such as a formation of a window and the moving of a mouse is communicated as information at a level of I parts of graphical user interface. Moreover, communication of the event information on the operation screen and communication of a moving image are separated. In addition, a method of compressing information on the operation screen and a method of compressing information on the moving image are separated. A necessary part of information on the moving image is selected and communicated depending on the state of the semiconductor inspection apparatus, an operation of an operator, and a pattern to be inspected.

摘要翻译： 可以在不对网络造成巨大负担的情况下传送被检查的图像。 远程控制台使操作屏幕和运动图像能够显示和处理，而无需颜色偏移。 操作屏幕上的信息不作为位图信息传送，但是诸如窗口的形成和鼠标的移动的事件信息作为图形用户界面的I部分的级别的信息被传送。 此外，操作画面上的事件信息和运动图像的通信的通信被分离。 此外，分离了在操作画面上压缩信息的方法和压缩关于运动图像的信息的方法。 根据半导体检查装置的状态，操作者的操作以及待检查的图案来选择和传送关于运动图像的信息的必要部分。