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1.发明申请SUBSTRATE FOR MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS 审中-公开用于磁记录介质，磁记录介质和磁记录和再现装置的基板公开(公告)号：US20110164337A1
公开(公告)日：2011-07-07
申请号：US13047077
申请日：2011-03-14
申请人： Kaori KIMURA , Masatoshi SAKURAI , Akira KIKITSU , Yoshiyuki KAMATA , Satoshi SHIROTORI , Hiroyuki HIEDA
发明人： Kaori KIMURA , Masatoshi SAKURAI , Akira KIKITSU , Yoshiyuki KAMATA , Satoshi SHIROTORI , Hiroyuki HIEDA
IPC分类号： G11B5/82
摘要： In an example magnetic recording medium substrate, a plurality of recording tracks are formed on a substrate, each recording track being formed of a magnetic material. Non-recording sections are formed on the substrate, each non-recording section separating adjacent recording tracks. Each recording track includes a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section has a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.
摘要翻译： 在一个示例性磁记录介质基板中，在基板上形成多个记录磁道，每个记录磁道由磁性材料形成。 非记录部分形成在基板上，每个非记录部分分隔相邻的记录道。 每个记录轨道包括多个记录部分和连接部分，用于在轨道纵向方向上连接与其相邻的记录部分，并且每个连接部分具有在轨道宽度方向上的横截面积小于横截面积的横截面积 相邻记录部的轨道宽度方向。
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2.发明申请SUBSTRATE FOR MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS 有权用于磁记录介质，磁记录介质和磁记录和再现装置的基板公开(公告)号：US20090273858A1
公开(公告)日：2009-11-05
申请号：US12503458
申请日：2009-07-15
申请人： Kaori KIMURA , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
发明人： Kaori KIMURA , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
IPC分类号： G11B5/187
摘要： It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.
摘要翻译： 可以改善记录和再现S / N比，再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道，每个记录磁道由磁性材料形成，而非记录部分形成在基板上，每个非记录部分分隔相邻的记录磁道，每个记录磁道包括多个 记录部分和连接部分，用于在轨道纵向方向上连接与其相邻的记录部分，并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。
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公开(公告)号：US20100006537A1
公开(公告)日：2010-01-14
申请号：US12561151
申请日：2009-09-16
申请人： Yoshiyuki KAMATA , Akira KIKITSU , Yosuke ISOWAKI , Kaori KIMURA , Satoshi SHIROTORI , Masatoshi SAKURAI
发明人： Yoshiyuki KAMATA , Akira KIKITSU , Yosuke ISOWAKI , Kaori KIMURA , Satoshi SHIROTORI , Masatoshi SAKURAI
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer on a substrate, the magnetic recording layer having a multi-layered structure of two or more layers at least one layer of which has a granular structure including CoCrPt alloy and SiO2, TiO2, CrO2, CoO2 or Ta2O5, forming masks on areas corresponding to recording regions of the magnetic recording layer, partially etching the magnetic recording layer in areas not covered with the masks with an etching gas to expose the granular layer of the magnetic recording layer and to form protrusions and recesses on the magnetic recording layer, modifying the granular layer of the magnetic recording layer remaining in the recesses with modifying gas, promoting modification reaction to form non-recording regions, and forming a protective film on an entire surface.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在基片上沉积磁记录层，该磁记录层具有两层或更多层的多层结构，其至少一层具有包括CoCrPt 合金和SiO 2，TiO 2，CrO 2，CoO 2或Ta 2 O 5，在与磁记录层的记录区相对应的区域上形成掩模，用蚀刻气体部分蚀刻未被掩模覆盖的区域中的磁记录层，以暴露出 磁记录层，并在磁记录层上形成凸起和凹槽，用改性气体改性残留在凹槽中的磁记录层的颗粒层，促进改性反应形成非记录区，并在整体上形成保护膜 表面。
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公开(公告)号：US20100000966A1
公开(公告)日：2010-01-07
申请号：US12561168
申请日：2009-09-16
IPC分类号： B44C1/22
CPC分类号： G11B5/855 , H01F10/12 , H01F10/265 , H01F41/34
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer on a substrate, forming masks on areas corresponding to recording regions of the magnetic recording layer, partially etching the magnetic recording layer in areas not covered with the masks with an etching gas to form protrusions and recesses on the magnetic recording layer, modifying the magnetic recording layer remaining in the recesses with Ne gas to form non-recording regions, and forming a protecting film on an entire surface.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在基片上沉积磁记录层，在与磁记录层的记录区对应的区域上形成掩模，在未被掩模覆盖的区域中部分蚀刻磁记录层 用蚀刻气体在磁记录层上形成突起和凹陷，用Ne气体修饰残留在凹槽中的磁记录层，形成非记录区，并在整个表面上形成保护膜。
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公开(公告)号：US20100000965A1
公开(公告)日：2010-01-07
申请号：US12558372
申请日：2009-09-11
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer on a substrate, forming masks on areas corresponding to recording regions of the magnetic recording layer, partially etching the magnetic recording layer in areas not covered with the masks with an etching gas to form protrusions and recesses on the magnetic recording layer, modifying the magnetic recording layer remaining in the recesses with a modifying gas to form non-recording regions, and forming a protecting film on an entire surface.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在基片上沉积磁记录层，在与磁记录层的记录区相对应的区域上形成掩模，在未被掩模覆盖的区域中部分蚀刻磁记录层 用蚀刻气体在磁记录层上形成突起和凹陷，用修改气体改变留在凹槽中的磁记录层，形成非记录区，并在整个表面上形成保护膜。
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公开(公告)号：US20130075358A1
公开(公告)日：2013-03-28
申请号：US13678303
申请日：2012-11-15
IPC分类号： G11B5/851
摘要： A magnetic recording medium a magnetic recording medium includes a soft magnetic layer formed on a substrate, magnetic patterns made of a protruded ferromagnetic layer separated from each other on the soft magnetic layer, and a nonmagnetic layer formed between the magnetic patterns, a nitrogen concentration therein being higher on a surface side than on a substrate side.
摘要翻译： 一种磁记录介质，磁记录介质包括形成在基板上的软磁性层，在软磁层上彼此分离的突出的铁磁层形成的磁性图案和形成在磁性图案之间的非磁性层，其中的氮浓度 在表面侧比在基板侧高。
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公开(公告)号：US20110014496A1
公开(公告)日：2011-01-20
申请号：US12838349
申请日：2010-07-16
摘要： According to one embodiment, there is provided a method of manufacturing a magnetic recording medium, including forming a first hard mask including carbon as a main component, a second hard mask including a main component other than carbon and a resist on a magnetic recording layer, contacting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues in the recesses of the patterned resist, etching the second hard mask, etching the first hard mask, patterning the magnetic recording layer, and removing the first hard mask, the method further including, between etching the first hard mask and removing the first hard mask, removing the second hard mask remaining on the protrusions of the first hard mask, and removing a contaminating layer on a surface of the first hard mask by a mixed gas of oxygen-based gas and a fluorine compound.
摘要翻译： 根据一个实施例，提供了一种制造磁记录介质的方法，包括形成包括碳作为主要成分的第一硬掩模，包括除碳以外的主要成分的第二硬掩模和在磁记录层上的抗蚀剂， 将压模接触抗蚀剂以将突起和凹陷的图案转移到抗蚀剂，去除图案化抗蚀剂的凹部中的残留物，蚀刻第二硬掩模，蚀刻第一硬掩模，图案化磁记录层，以及去除第一硬 掩模，所述方法还包括在蚀刻所述第一硬掩模和去除所述第一硬掩模之间，去除残留在所述第一硬掩模的突起上的所述第二硬掩模，以及通过所述第一硬掩模的表面去除所述第一硬掩模的表面上的污染层 氧基气体和氟化合物的混合气体。
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8.发明申请公开(公告)号：US20100047625A1
公开(公告)日：2010-02-25
申请号：US12544606
申请日：2009-08-20
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层 通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。
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公开(公告)号：US20100215989A1
公开(公告)日：2010-08-26
申请号：US12705456
申请日：2010-02-12
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, subjecting the magnetic recording layer exposed in the recesses to modifying treatment to change an etching rate, and deactivating the magnetic recording layer exposed in the recesses.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 去除残留在图案化抗蚀剂的凹部中的残留物，通过使用图案化抗蚀剂作为掩模蚀刻第二硬掩模以将突起和凹陷的图案转移到第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 用于将突起和凹陷的图案转移到第一硬掩模的掩模，对暴露于凹部中的磁记录层进行修改处理以改变蚀刻速率，以及使在凹部中暴露的磁记录层失活。
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公开(公告)号：US20100214694A1
公开(公告)日：2010-08-26
申请号：US12705421
申请日：2010-02-12
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, removing the second hard mask remaining on the protrusions of the first hard mask, and deactivating the magnetic recording layer exposed in the recesses by means of ion beam irradiation.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 去除残留在图案化抗蚀剂的凹部中的残留物，通过使用图案化抗蚀剂作为掩模蚀刻第二硬掩模以将突起和凹陷的图案转移到第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 用于将突起和凹陷的图案转移到第一硬掩模的掩模，去除残留在第一硬掩模的突起上的第二硬掩模，以及通过离子束照射去除在凹部中暴露的磁记录层。
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