METHOD TO REDUCE DISLOCATION DENSITY IN SILICON
    2.
    发明申请
    METHOD TO REDUCE DISLOCATION DENSITY IN SILICON 审中-公开
    降低硅中偏差密度的方法

    公开(公告)号:US20090184382A1

    公开(公告)日:2009-07-23

    申请号:US12358755

    申请日:2009-01-23

    CPC分类号: C30B33/02 C30B29/06

    摘要: A crystalline material structure is provided. The crystalline material structure includes a semiconductor structure being annealed at temperatures above the brittle-to-ductile transition temperature of the semiconductor structure, and cooled in an approximately linear time-temperature profile down to approximately its respective transition temperature T0.

    摘要翻译: 提供结晶材料结构。 结晶材料结构包括在高于半导体结构的脆性 - 延性转变温度的温度下退火的半导体结构,并且在近似线性时间 - 温度分布下冷却至大约其各自的转变温度T0。