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    Systems and methods for managing fluids using a liquid ring pump
    2.
    发明申请
    Systems and methods for managing fluids using a liquid ring pump 有权
    使用液环泵管理流体的系统和方法

    公开(公告)号：US20070110591A1

    公开(公告)日：2007-05-17

    申请号：US11549094

    申请日：2006-10-12

    申请人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

    发明人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

    IPC分类号： F04B49/00

    CPC分类号： F04C19/001 ,  H01L21/67017

    摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

    摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

    Liquid ring pumping and reclamation systems in a processing environment
    3.
    发明申请
    Liquid ring pumping and reclamation systems in a processing environment 审中-公开
    液环泵送和回收系统在加工环境中

    公开(公告)号：US20070109912A1

    公开(公告)日：2007-05-17

    申请号：US11549098

    申请日：2006-10-12

    申请人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

    发明人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

    IPC分类号： B01F15/04

    CPC分类号： G05D11/138 ,  B24B57/00 ,  F04C19/001 ,  H01L21/67017

    摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

    摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

    Method and apparatus for asynchronous blending and supply of chemical solutions
    5.
    发明申请
    Method and apparatus for asynchronous blending and supply of chemical solutions 有权
    用于异步混合和提供化学溶液的方法和装置

    公开(公告)号：US20050286340A1

    公开(公告)日：2005-12-29

    申请号：US11107494

    申请日：2005-04-15

    申请人： Karl Urquhart

    发明人： Karl Urquhart

    IPC分类号： B01F15/04

    CPC分类号： B01F15/00194 ,  B01F15/0408 ,  B01F2215/0032 ,  B01F2215/0096 ,  G05D11/138 ,  Y10T137/0335 ,  Y10T137/034 ,  Y10T137/2506 ,  Y10T137/2509

    摘要： Methods and apparatuses for blending and supply of chemical solutions. The method of the present invention includes a continuous blending system. This continuous blending system monitors the output and continuously adjusts the blending system to achieve a predetermined formulation of at least a first solution. A centralized monitoring system continuously evaluates the solutions and adjusts the output of the blender as needed to maintain the predetermined formulation of the solution. The system includes at least a first tank system. Any solutions that are delivered from this tank system are also continuously monitored, evaluated, and adjusted as needed by the centralized monitoring system.

    摘要翻译： 混合和供应化学溶液的方法和装置。 本发明的方法包括连续混合系统。 该连续混合系统监测输出并连续地调节混合系统以实现至少第一解决方案的预定配方。 集中监控系统根据需要持续评估解决方案并调整搅拌机的输出量，以维持解决方案的预定配方。 该系统至少包括第一罐系统。 从这个坦克系统提供的任何解决方案也将由集中监控系统根据需要进行持续监控，评估和调整。

    POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS
    6.
    发明申请
    POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS 审中-公开
    使用要点控制搅拌机系统及其对应方法

    公开(公告)号：US20070070803A1

    公开(公告)日：2007-03-29

    申请号：US11533826

    申请日：2006-09-21

    申请人： Karl Urquhart

    发明人： Karl Urquhart

    IPC分类号： B01F15/04

    CPC分类号： B01F15/00207 ,  B01F15/0022 ,  B01F15/0429 ,  G05D11/139

    摘要： A blender system is provided that maintains a chemical solution bath at desired concentrations. The blender system includes a blender unit configured to receive and blend at least two chemical compounds and deliver a solution including a mixture of compounds at selected concentrations to a tank that retains a selected volume of a chemical solution bath. The blender system further includes a controller configured to maintain at least one compound within a selected concentration range in the chemical solution bath. The controller controls at least one of operation of the blender unit to maintain the concentration of the compound within a selected concentration range within the solution delivered to the tank, and a change in flow rate of solution into and out of the tank when a concentration of the compound within the chemical solution bath falls outside of a target range.

    摘要翻译： 提供了一种将所需浓度的化学溶液浴保持在一起的混合器系统。 搅拌器系统包括配置成接收和混合至少两种化学化合物并将包含选定浓度的化合物混合物的溶液输送到保留选定体积的化学溶液浴的罐的搅拌器单元。 搅拌器系统还包括控制器，其被配置为将至少一种化合物保持在化学溶液浴中的选定浓度范围内。 控制器控制搅拌器单元的操作中的至少一个，以将化合物的浓度保持在输送到罐中的溶液中的选定浓度范围内，以及溶液进出槽的流速的变化，当浓度 化学溶液浴中的化合物落在目标范围之外。

    Method and apparatus for continuously blending chemical solutions
    7.
    发明申请
    Method and apparatus for continuously blending chemical solutions 审中-公开
    连续混合化学溶液的方法和设备

    公开(公告)号：US20050029170A1

    公开(公告)日：2005-02-10

    申请号：US10939570

    申请日：2004-09-13

    申请人： Karl Urquhart ,  John Thompson ,  Joe Hoffman

    发明人： Karl Urquhart ,  John Thompson ,  Joe Hoffman

    IPC分类号： B01F15/04 ,  H01L21/306 ,  B01D17/12

    CPC分类号： B01F15/00227 ,  B01F15/0408 ,  H01L21/02052 ,  H01L21/30604 ,  H01L21/30608 ,  Y10T137/0329 ,  Y10T137/034 ,  Y10T137/2509

    摘要： Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.

    摘要翻译： 提供了用于连续混合用于半导体处理的化学溶液的方法和装置。 该方法包括以下步骤：以受控的方式将第一化学物流与第二化学物流混合，形成具有预定配方的溶液流。 该装置允许实施上述方法。 该方法和装置可以以连续的方式准确地提供所需浓度的化学溶液。 本发明在半导体器件制造中具有特别的适用性。