公开(公告)号：US5616264A

公开(公告)日：1997-04-01

申请号：US259180

申请日：1994-06-13

申请人： Katsuo Nishi ,  Kazuo Terada ,  Wataru Ohkase ,  Kenichi Yamaga

发明人： Katsuo Nishi ,  Kazuo Terada ,  Wataru Ohkase ,  Kenichi Yamaga

IPC分类号： C23C16/46 ,  C30B25/10 ,  C30B31/12 ,  G05D23/19 ,  H05B1/02

CPC分类号： C30B31/12 ,  C23C16/46 ,  C30B25/10 ,  G05D23/1934

摘要： A temperature control method in a rapid heat treatment apparatus comprising simulatively heating dummy wafers in a process tube and previously detecting and grasping by temperature sensors a wafer temperature rising pattern, a heater temperature rising pattern and an internal atmosphere temperature rising pattern, arranging wafers to be processed in the process tube, detecting a temperature of each zone and that of each heater element by the temperature sensors, upon heating the wafers, and controlling each heater element on the basis of the detected temperatures and the wafer, heater and internal atmosphere temperature rising patterns by a controller to rapidly and uniformly raise the temperature of each wafer until the temperature of the wafers in each zone reaches the intended one and becomes stable.

摘要翻译： 一种快速热处理装置中的温度控制方法，包括在处理管中模拟加热虚拟晶片并预先通过温度传感器检测和掌握晶片温度升高图案，加热器温度升高图案和内部气氛升温图案，将晶片设置为 在处理管中处理，在加热晶片时，通过温度传感器检测每个区域和每个加热器元件的温度，并且基于检测到的温度和晶片，加热器和内部气氛温度升高来控制每个加热器元件 通过控制器快速均匀地提高每个晶片的温度直到每个区域中的晶片的温度达到预期的温度并变得稳定。

公开(公告)号：US5897311A

公开(公告)日：1999-04-27

申请号：US654413

申请日：1996-05-28

申请人： Katsuo Nishi

发明人： Katsuo Nishi

IPC分类号： C23C16/458 ,  C30B25/12 ,  C30B31/14 ,  H01L21/22 ,  H01L21/31 ,  H01L21/324 ,  H01L21/673 ,  F27D3/12

CPC分类号： H01L21/67303 ,  C23C16/4583 ,  C30B25/12 ,  C30B31/14 ,  H01L21/67309

摘要： A support boat for objects-to-be-processed including a plurality of support shelves formed in multi-stages spaced from each other by a vertical pitch for mounting a plurality of objects-to-be-processed which are to be heat treated in a vertical heat treatment apparatus; and a plurality of support bars for interconnecting the support shelves vertically spaced from each other and holding the same, the support boat comprising a light shielding plate disposed above an uppermost one or below a lowermost one of the support shelves for blocking heat rays from a heater for heating, whereby abrupt heating of central parts of those of the objects-to-be-processed which are positioned near the top or the bottom of the support boat is suppressed, and all the objects-to-be-processed can have substantially the same heat history.

摘要翻译： 一种用于待处理物体的支撑船，包括多个以彼此间隔开的垂直间距形成的支撑架，用于安装待处理的多个待处理物体 立式热处理设备; 以及多个支撑杆，用于将支撑架彼此垂直间隔开并将其保持，所述支撑舟包括设置在支撑架的最下面的一个或更下方的遮光板，用于阻挡来自加热器的热射线 为了加热，由此抑制位于支撑船的顶部或底部附近的待处理物体的中心部分的突然加热，并且所有被处理物体可以具有基本上 同样的热史。

公开(公告)号：US06134818A

公开(公告)日：2000-10-24

申请号：US727156

申请日：1996-10-07

申请人： Masanori Idesawa ,  Katsuo Nishi ,  Hiroshi Kato ,  Susumu Moda

发明人： Masanori Idesawa ,  Katsuo Nishi ,  Hiroshi Kato ,  Susumu Moda

IPC分类号： G09F19/12 ,  G09F19/00

CPC分类号： G09F19/12

摘要： An apparatus for the formation of a visual sense effect comprises a first object A having a plurality of windows disposed around an axis of rotation C and a second object B so disposed as to show part thereof through the windows W of the first object A, with the first object A and the second object B adapted to be rotated relative to each other round the axis of rotation C. By virtue of the visual sense effect in vision, this apparatus allows an object of a polygonal shape to be perceived as though the object were repeating enlargement, contraction, deformation, and eccentric movement.

摘要翻译： 用于形成视觉效果的装置包括具有围绕旋转轴线C设置的多个窗口的第一物体A和设置成通过第一物体A的窗口W显示其一部分的第二物体B， 第一物体A和第二物体B适于围绕旋转轴线C相对于彼此旋转。由于视觉中的视觉效果，该装置允许感觉到多边形形状的物体就像物体 正在重复扩大，收缩，变形和偏心运动。

公开(公告)号：US6138393A

公开(公告)日：2000-10-31

申请号：US726496

申请日：1996-10-07

申请人： Masanori Idesawa ,  Katsuo Nishi ,  Hiroshi Kato ,  Susumu Shimoda

发明人： Masanori Idesawa ,  Katsuo Nishi ,  Hiroshi Kato ,  Susumu Shimoda

IPC分类号： G09F19/12 ,  G09F19/00

CPC分类号： G09F19/12

摘要： An apparatus for the formation of a visual sense effect comprises a first object A having a plurality of windows disposed around an axis of rotation C and a second object B so disposed as to show part thereof through the windows W of the first object A, with the first object A and the second object B adapted to be rotated relative to each other round the axis of rotation C. By virtue of the visual sense effect in vision, this apparatus allows an object of a polygonal shape to be perceived as though the object were repeating enlargement, contraction, deformation, and eccentric movement.