公开(公告)号：US5674771A

公开(公告)日：1997-10-07

申请号：US34906

申请日：1993-03-22

申请人： Katsuyuki Machida ,  Kazuo Imai ,  Hideo Yoshino ,  Yoshiharu Ozaki ,  Kenji Miura

发明人： Katsuyuki Machida ,  Kazuo Imai ,  Hideo Yoshino ,  Yoshiharu Ozaki ,  Kenji Miura

IPC分类号： H01L21/02 ,  H01L21/70

CPC分类号： H01L28/40

摘要： A structure of a capacitor includes a first metal interconnection layer, a dielectric film, and a second metal interconnection layer. The dielectric film is formed on the first metal interconnection layer. The second metal interconnection layer is formed on the dielectric film. The dielectric film is a dielectric film formed by bias-ECR plasma CVD.

摘要翻译： 电容器的结构包括第一金属互连层，电介质膜和第二金属互连层。 电介质膜形成在第一金属互连层上。 第二金属互连层形成在电介质膜上。 电介质膜是通过偏置ECR等离子体CVD形成的电介质膜。

公开(公告)号：US5661560A

公开(公告)日：1997-08-26

申请号：US654595

申请日：1996-05-29

申请人： Yoshiharu Ozaki

发明人： Yoshiharu Ozaki

IPC分类号： G01N21/956 ,  G03F7/20 ,  G01J4/00

CPC分类号： G03F7/7085 ,  G01N21/956 ,  G03F7/70566

摘要： In a photomask inspecting method, a photomask is inspected on the basis of the difference between the polarized state of elliptical light produced upon superposition of two linearly polarized light beams having orthogonal polarization directions and passing through two different optical paths and the polarized state of elliptical light produced when two linearly polarized light beams are superposed on each other after a target portion of a photomask is set in the optical path of one of the linearly polarized light beams. A photomask inspecting apparatus is also disclosed.

摘要翻译： 在光掩模检查方法中，基于在具有正交偏振方向的两个线性偏振光束的叠加并通过两个不同光路并且经过两个不同光路的极化状态的椭圆光的极化状态之间的差异来检查光掩模 在将光掩模的目标部分设置在一个直线偏振光束的光路中之后，将两个线偏振光束彼此重叠产生。 还公开了一种光掩模检查装置。

公开(公告)号：US06504485B2

公开(公告)日：2003-01-07

申请号：US09756267

申请日：2001-01-09

申请人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

发明人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

IPC分类号： G08B2100

CPC分类号： G08G1/097

摘要： Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.

摘要翻译： 用于在多个道路相交的十字路口等处提供的交通信号灯的正常操作的故障安全监视监视和控制装置。 使用传感器装置检测各信号灯的照明条件，当照明或非照明信号灯的数量为预定数量时，产生与高能量条件对应的逻辑值1的正常判断输出，而当 照明信号灯或非照明信号灯的数量不是预定数量，产生对应于低能量条件的逻辑值0的异常判断输出。 结果，当监视装置中的故障停止输出时，由此产生的输出条件与由于信号光异常引起的危险状况相同，导致极其安全的信号灯监视和控制，具有优良的故障安全特性 。

公开(公告)号：US06184799B2

公开(公告)日：2001-02-06

申请号：US08750771

申请日：1996-12-17

申请人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

发明人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

IPC分类号： G08G1095

CPC分类号： G08G1/097

摘要： Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.

摘要翻译： 用于在多个道路相交的十字路口等处提供的交通信号灯的正常操作的故障安全监视监视和控制装置。 使用传感器装置检测各信号灯的照明条件，当照明或非照明信号灯的数量为预定数量时，产生与高能量条件对应的逻辑值1的正常判断输出，而当 照明信号灯或非照明信号灯的数量不是预定数量，产生对应于低能量条件的逻辑值0的异常判断输出。 结果，当监视装置中的故障停止输出时，由此产生的输出条件与由于信号光异常引起的危险状况相同，导致极其安全的信号灯监视和控制，具有优良的故障安全特性 。

公开(公告)号：US5548401A

公开(公告)日：1996-08-20

申请号：US293130

申请日：1994-08-19

申请人： Yoshiharu Ozaki

发明人： Yoshiharu Ozaki

IPC分类号： G01N21/956 ,  G01N21/88 ,  G01J4/00 ,  G01J4/04

CPC分类号： G01N21/956

摘要： In a photomask inspecting method, a photomask is inspected on the basis of the difference between the polarized state of elliptical light produced upon superposition of two linearly polarized light beams having orthogonal polarization directions and passing through two different optical paths and the polarized state of elliptical light produced when two linearly polarized light beams are superposed on each other after a target portion of a photomask is set in the optical path of one of the linearly polarized light beams. A photomask inspecting apparatus is also disclosed.

摘要翻译： 在光掩模检查方法中，基于在具有正交偏振方向的两个线性偏振光束的叠加并通过两个不同光路并且经过两个不同光路的极化状态的椭圆光的极化状态之间的差异来检查光掩模 在将光掩模的目标部分设置在一个直线偏振光束的光路中之后，将两个线偏振光束彼此重叠产生。 还公开了一种光掩模检查装置。

公开(公告)号：US4746468A

公开(公告)日：1988-05-24

申请号：US864015

申请日：1986-05-16

申请人： Yoshiharu Ozaki ,  Mitsushi Wadasako ,  Toshihiro Kasai ,  Yoshinori Shinohara

发明人： Yoshiharu Ozaki ,  Mitsushi Wadasako ,  Toshihiro Kasai ,  Yoshinori Shinohara

IPC分类号： B01J2/06 ,  C01B13/14 ,  C01F7/02 ,  C01G25/02 ,  C04B35/10 ,  C04B35/486 ,  C04B35/626 ,  B29B9/08 ,  C04B35/64

CPC分类号： C04B35/486 ,  B01J2/06 ,  C04B35/10

摘要： A manufacturing method for ceramic microspheres including the steps of; forming a suspension of ceramic fine powders as a dispersed phase and water as a dispersion medium; dispersing the suspension as droplets in a high boiling point liquid which has substantially the same specific gravity as the suspension and which is immiscible with water and nonreactive with the ceramic fine powder to make spherical particles; and subjecting the resultant product to drying and calcination.

摘要翻译： 一种陶瓷微球的制造方法，包括以下步骤： 形成作为分散相的陶瓷细粉末的悬浮液和作为分散介质的水; 将悬浮液作为液滴分散在具有与悬浮液基本相同的比重的高沸点液体中，并且与水不混溶并且与陶瓷细粉不反应以制备球形颗粒; 并对所得产物进行干燥和煅烧。

公开(公告)号：US4507245A

公开(公告)日：1985-03-26

申请号：US509017

申请日：1983-06-29

申请人： Yoshiharu Ozaki ,  Kimiyoshi Kaneko ,  Senshu Mitachi

发明人： Yoshiharu Ozaki ,  Kimiyoshi Kaneko ,  Senshu Mitachi

IPC分类号： C07C29/68 ,  C07F5/00 ,  C07C31/28

CPC分类号： C07F5/003 ,  C07C29/685

摘要： A new improved process of producing a rare earth metal alkoxide is now provided, which comprises reacting a rare earth metal carboxylate with an alkali metal alkoxide in an inert organic solvent under anhydrous conditions, and which can be conducted in a facile way and give the desired rare earth metal alkoxide of a high purity in a high yield.

摘要翻译： 现在提供了一种新的改进的稀土金属醇盐的制备方法，其包括使稀土金属羧酸盐与碱金属醇盐在惰性有机溶剂中在无水条件下反应，并且可以以容易的方式进行，得到所需的 高纯度的稀土金属醇盐，产率高。