Manufacturing method of magnetic memory device
    4.
    发明授权
    Manufacturing method of magnetic memory device 失效
    磁存储器件的制造方法

    公开(公告)号:US06572917B2

    公开(公告)日:2003-06-03

    申请号:US10189821

    申请日:2002-07-03

    IPC分类号: B05D512

    摘要: A manufacturing method of a magnetic memory device, wherein the inventive method does not require any special technique for forming pattern, but bilaterally ensures precision for processing a tunnel magneto-resistive effect element (called TMR element) and self-matching formation of connecting elements. The manufacturing method of a magnetic memory device comprises a processing step of forming a tunnel magneto-resistive effect film sandwiching a tunnel barrier layer between a magnetic pinned layer and a memory layer into a predetermined elementary configuration by applying a mask layer, wherein the mask layer is formed by applying a plating process.

    摘要翻译: 一种磁存储器件的制造方法,其中本发明的方法不需要任何形成图案的特殊技术,而是双边确保处理隧道磁阻效应元件(称为TMR元件)和连接元件的自匹配形成的精度。 磁存储器件的制造方法包括:处理步骤,通过施加掩模层,形成在磁性被钉扎层和存储层之间夹入隧道势垒层的隧道磁阻效应膜到预定的基本构型,其中掩模层 通过施加电镀工艺形成。