公开(公告)号：US06568267B2

公开(公告)日：2003-05-27

申请号：US09838287

申请日：2001-04-20

申请人： Kazumi Chida ,  Masato Hashimoto ,  Masaru Nagao ,  Hidemi Senda ,  Norihisa Okayama ,  Keiko Neki ,  Masahiro Sugimoto

发明人： Kazumi Chida ,  Masato Hashimoto ,  Masaru Nagao ,  Hidemi Senda ,  Norihisa Okayama ,  Keiko Neki ,  Masahiro Sugimoto

IPC分类号： G01C1900

CPC分类号： G01C19/5719 ,  G01P2015/0814

摘要： A sensing device, such as an angular speed detecting device, includes a vibrator for improving detection precision. The vibrator is displaceably supported on a substrate and is vibrated in the direction of an X-axis by driving electrodes. Detecting electrodes detect vibrations of the vibrator in the direction of a Y-axis caused by a Coriolis' force resulting from the angular speed occurring about a Z-axis. Each of the driving and detecting electrodes includes a movable electrode that is connected to the vibrator and that is displaced together therewith on the substrate and a fixed electrode fixed onto the substrate in such a manner as to face the movable electrode. By equalizing conductors connected to fixed electrodes of the driving electrodes and conductors connected to fixed electrodes of the detecting electrodes in length, width, and thickness, respectively, one electrical characteristic is set for those of the wiring portions which function in the same manner.

摘要翻译： 诸如角速度检测装置的感测装置包括用于提高检测精度的振动器。 振动器被可移动地支撑在基板上，并且通过驱动电极在X轴的方向上振动。 检测电极通过由围绕Z轴的角速度产生的科里奥利力产生的Y轴方向检测振动器的振动。 每个驱动和检测电极都包括一个可动电极，它连接到振子上并与基板一起位移在一起，固定电极以面对可动电极的方式固定在基板上。 通过使连接到驱动电极的固定电极的导体和连接到检测电极的固定电极的导体的长度，宽度和厚度分别相等，为相同方式起作用的布线部分设置一个电特性。