公开(公告)号：US07855819B2

公开(公告)日：2010-12-21

申请号：US12198848

申请日：2008-08-26

申请人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

发明人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

IPC分类号： G02B26/08

CPC分类号： G02B26/0866

摘要： A swing member device comprises a swingable part supported by a supporting part to be swingable around a torsional axis on a supporting base in at least one intrinsic oscillation mode: the swing member device having a temperature-raising unit for raising the temperature of ambient atmosphere in the region of swing motion of the swingable part, the temperature-raising unit raising the temperature of the ambient atmosphere to enable decrease of an influence of an unsteady dragging force caused by the ambient atmosphere.

摘要翻译： 摆动构件装置包括由支撑部支撑的可摆动部分，以在至少一个本征振荡模式中在支撑基座上绕扭转轴线摆动：摆动构件装置具有用于将环境气氛的温度升高的升温单元 可摆动部分的摆动区域，升温单元提高环境大气的温度，能够降低由环境气氛引起的不稳定拖曳力的影响。

公开(公告)号：US07643197B2

公开(公告)日：2010-01-05

申请号：US12267803

申请日：2008-11-10

申请人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

发明人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

IPC分类号： G02B26/08

CPC分类号： G02B26/105 ,  Y10S359/90

摘要： A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined width.

摘要翻译： 一种制造基于蚀刻单晶硅衬底的振荡器的方法，所述方法包括掩模形成步骤，用于在单晶硅衬底上形成具有由多个相互耦合的振荡器组成的重复形状的图案的蚀刻掩模，每个包括 在支撑基板和可动部件之间的扭转弹簧，在使用蚀刻掩模作为掩模的同时蚀刻单晶硅基板的蚀刻步骤，在单晶硅基板上形成由多个对应的相互耦合的振荡器 以及切割步骤，用于确定每个振荡器的可移动部件和支撑基板的重复形状的宽度，该宽度有效地确定当这些振荡器用作振荡器时所需的各个振荡器的谐振频率，以及 用于通过在相邻振荡之间切割可移动部件和支撑基板进行切割 ator，以确定的宽度。

公开(公告)号：US20090067019A1

公开(公告)日：2009-03-12

申请号：US12198848

申请日：2008-08-26

申请人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

发明人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

IPC分类号： G02B26/08

CPC分类号： G02B26/0866

摘要： A swing member device comprises a swingable part supported by a supporting part to be swingable around a torsional axis on a supporting base in at least one intrinsic oscillation mode: the swing member device having a temperature-raising unit for raising the temperature of ambient atmosphere in the region of swing motion of the swingable part, the temperature-raising unit raising the temperature of the ambient atmosphere to enable decrease of an influence of an unsteady dragging force caused by the ambient atmosphere.

摘要翻译： 摆动构件装置包括由支撑部支撑的可摆动部分，以在至少一个本征振荡模式中在支撑基座上绕扭转轴线摆动：摆动构件装置具有用于将环境气氛的温度升高的升温单元 可摆动部分的摆动区域，升温单元提高环境大气的温度，能够降低由环境气氛引起的不稳定拖曳力的影响。

公开(公告)号：US07423795B2

公开(公告)日：2008-09-09

申请号：US11753062

申请日：2007-05-24

申请人： Takahisa Kato ,  Kazutoshi Torashima ,  Yukio Furukawa ,  Yasuhiro Shimada

发明人： Takahisa Kato ,  Kazutoshi Torashima ,  Yukio Furukawa ,  Yasuhiro Shimada

IPC分类号： G02B26/08

CPC分类号： G02B26/105 ,  G02B26/085

摘要： An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.

摘要翻译： 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统，所述振荡系统包括第一振荡器，第一扭转弹簧，第二振荡器，第二扭转弹簧和支撑部件，所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件，其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑， 围绕振荡轴的扭转振荡，其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑，用于围绕振荡轴线的扭转振荡，并且其中振荡系统具有至少两个具有不同频率的固有振荡模式，约为 振荡轴。

公开(公告)号：US20070279720A1

公开(公告)日：2007-12-06

申请号：US11753057

申请日：2007-05-24

申请人： Kazutoshi Torashima ,  Takahisa Kato ,  Yukio Furukawa ,  Yasuhiro Shimada

发明人： Kazutoshi Torashima ,  Takahisa Kato ,  Yukio Furukawa ,  Yasuhiro Shimada

IPC分类号： G02B26/08

CPC分类号： G02B26/105

摘要： An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.

摘要翻译： 光学偏转器包括支撑件，具有光偏转元件的第一可移动元件，至少一个第二可移动元件，至少一个构造成支撑第一和第二可移动元件的第一扭转弹簧，用于围绕振荡轴线的扭转振动， 至少一个第二扭转弹簧，其构造成支撑所述第二可移动元件和所述支撑构件，以围绕所述振荡轴线进行扭转振动;以及驱动系统，构造成将驱动力施加到所述第一和第二可移动元件中的至少一个， 所述第二可动元件相对于所述振动轴的惯性大于所述第一可动元件相对于所述振动轴的惯性矩，并且所述第二可动元件在垂直于所述振荡轴的方向上的长度为 等于或小于第一可移动元件在垂直于振荡轴线的方向上的长度。

公开(公告)号：US08305674B2

公开(公告)日：2012-11-06

申请号：US12673694

申请日：2008-10-28

申请人： Suguru Miyagawa ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Takahisa Kato ,  Kazunari Fujii

发明人： Suguru Miyagawa ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Takahisa Kato ,  Kazunari Fujii

IPC分类号： G02B26/10

CPC分类号： G02B26/105 ,  G02B26/085 ,  H04N1/1135 ,  Y10T29/49774

摘要： A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.

摘要翻译： 一种制造振荡器装置的方法，该振荡器装置具有通过用于围绕扭转轴线摆动并被以共振频率驱动的扭转弹簧相对于固定构件支撑的振荡器的方法，该方法包括用于确定惯性的假定值的第一步骤 振荡器的力矩，用于测量共振频率的第二步骤，用于计算扭簧的弹簧常数的第三步骤，根据在所述第一和第二步骤获得的惯性力矩的假定值和测得的共振频率， 基于在所述第三步骤计算的弹簧常数和相对于振荡器的共振频率确定的目标共振频率，计算用于振荡器的惯性矩或扭簧的弹簧常数的调节量的第四步骤 ，以便将谐振频率调节到目标谐振频率，以及用于调整res的第五步骤 基于计算出的调整量，振荡器的频率与目标谐振频率成正比。

公开(公告)号：US08081366B2

公开(公告)日：2011-12-20

申请号：US12174890

申请日：2008-07-17

申请人： Kazutoshi Torashima ,  Takahisa Kato

发明人： Kazutoshi Torashima ,  Takahisa Kato

IPC分类号： G02B26/08

CPC分类号： B41J2/471 ,  B81B3/0067 ,  B81B2201/042 ,  G02B26/0833 ,  G02B26/105 ,  H04N1/1135

摘要： An oscillating device includes a supporting portion, a movable portion, a torsion spring that supports the movable portion with respect to the supporting portion so that the movable portion is capable of torsionally vibrating around a torsion axis, and a driving unit that vibrates the movable portion. The torsion spring is formed of single-crystal silicon, and a crystal orientation parallel to the torsion axis of the torsion spring is a [111] orientation.

摘要翻译： 振动装置包括支撑部分，可动部分，扭转弹簧，其相对于支撑部分支撑可动部分，使得可动部分能够围绕扭转轴线扭转振动;以及驱动单元，其使可动部分 。 扭簧由单晶硅形成，并且与扭转弹簧的扭转轴平行的晶体取向为[111]取向。

公开(公告)号：US20090135472A1

公开(公告)日：2009-05-28

申请号：US12267803

申请日：2008-11-10

申请人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

发明人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

IPC分类号： G02F1/29 ,  H01L21/302

CPC分类号： G02B26/105 ,  Y10S359/90

摘要： A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined width.

摘要翻译： 一种制造基于蚀刻单晶硅衬底的振荡器的方法，所述方法包括掩模形成步骤，用于在单晶硅衬底上形成具有由多个相互耦合的振荡器组成的重复形状的图案的蚀刻掩模，每个包括 在支撑基板和可动部件之间的扭转弹簧，在使用蚀刻掩模作为掩模的同时蚀刻单晶硅基板的蚀刻步骤，在单晶硅基板上形成由多个对应的相互耦合的振荡器 以及切割步骤，用于确定每个振荡器的可移动部件和支撑基板的重复形状的宽度，该宽度有效地确定当这些振荡器用作振荡器时所需的各个振荡器的谐振频率，以及 用于通过在相邻振荡之间切割可移动部件和支撑基板进行切割 ator，以确定的宽度。

公开(公告)号：US07061063B2

公开(公告)日：2006-06-13

申请号：US10608111

申请日：2003-06-30

申请人： Takahisa Kato ,  Kazutoshi Torashima

发明人： Takahisa Kato ,  Kazutoshi Torashima

IPC分类号： H01L29/84

CPC分类号： H01F7/1646 ,  H01F7/122 ,  H01F2007/068

摘要： A microstructure includes a support substrate, a movable plate, and an elastic support portion having a first section with at least one concave portion and second sections having no concave portion. The second sections are arranged at both longitudinal ends of the first section and connect with the movable plate and the support substrate, respectively. The movable plate is supported by the elastic support portion so that the movable plate can be freely torsion-vibrated to the support substrate about a torsion axis.

摘要翻译： 微结构包括支撑基板，可动板和具有至少一个凹部的第一部分和不具有凹部的第二部分的弹性支撑部。 第二部分布置在第一部分的两个纵向端部处，分别与可动板和支撑基板连接。 可移动板由弹性支撑部支撑，使得可动板可以围绕扭转轴线自由地扭转到支撑基板。

公开(公告)号：US08809200B2

公开(公告)日：2014-08-19

申请号：US12271993

申请日：2008-11-17

申请人： Kazutoshi Torashima ,  Takahisa Kato ,  Takahiro Akiyama

发明人： Kazutoshi Torashima ,  Takahisa Kato ,  Takahiro Akiyama

IPC分类号： H01L21/302 ,  H01L21/461 ,  B81C1/00 ,  H01L21/308

CPC分类号： B81C1/0042 ,  B81C1/00626 ,  G02B26/0833 ,  H01L21/3086

摘要： A method of manufacturing a structure includes a first step of forming, on a monocrystal silicon substrate having a (100) surface as a principal surface, a basic etching mask corresponding to a target shape and having at least a first structure with a projecting corner and a second structure adjoining the first structure with an opening intervening therebetween, and a correction etching mask extending from the projecting corner of an etching mask of the first structure and connected to an etching mask of the second structure, and a second step of performing anisotropic etching of the monocrystal silicon substrate having the basic etching mask and the correction etching mask to form the target shape.

摘要翻译： 一种制造结构的方法包括：在具有（100）表面作为主表面的单晶硅衬底上形成与目标形状对应的至少具有突出角的第一结构的基本蚀刻掩模的第一步骤， 与第一结构邻接的第二结构，其间具有开口;以及校正蚀刻掩模，其从第一结构的蚀刻掩模的投影角延伸并连接到第二结构的蚀刻掩模，以及执行各向异性蚀刻的第二步骤 具有基本蚀刻掩模和校正蚀刻掩模的单晶硅衬底以形成目标形状。