公开(公告)号：US06213852B1

公开(公告)日：2001-04-10

申请号：US09350920

申请日：1999-07-12

申请人： Kazuyuki Fujii ,  Takanori Sasaki ,  Mahito Sawada ,  Kouichiro Tsutahara

发明人： Kazuyuki Fujii ,  Takanori Sasaki ,  Mahito Sawada ,  Kouichiro Tsutahara

IPC分类号： B24B2900

CPC分类号： B24B37/04 ,  B24B57/02

摘要： A method of manufacturing a semiconductor device using a polishing apparatus is provided. A top ring holding a wafer is arranged on a pad. A polishing chemical liquid supply line for supplying a polishing chemical liquid is arranged above the pad in a direction ahead of rotation with respect to the top ring. Around the center of rotation of the pad, a partition plate having a columnar side surface is arranged. Above the pad on a side which goes away from the top ring when the pad is rotated, a polishing chemical liquid draining mechanism is arranged extending continuously from the partition plate to the outer periphery of the pad. Accordingly, a polishing apparatus is obtained by which the amount of polishing of the surface to be polished of the semiconductor substrate is stabilized and generation of microscratches on the surface to be polished can be suppressed.

摘要翻译： 提供了使用抛光装置制造半导体器件的方法。 保持晶片的顶环布置在垫上。 用于供给研磨用化学液的研磨用药液供给配线相对于上述环设置在相对于上述旋转方向的方向上。 围绕垫的旋转中心，布置有具有柱状侧表面的隔板。 在衬垫旋转时离开顶环的一侧的衬垫上方，抛光化学液排放机构被布置成从隔板连续延伸到衬垫的外周。 因此，可以获得能够稳定半导体基板的被研磨面的研磨量并且能够抑制待研磨面的微细化的研磨装置。

公开(公告)号：US08676076B2

公开(公告)日：2014-03-18

申请号：US12792310

申请日：2010-06-02

申请人： Takashi Ohhashi ,  Takanori Sasaki

发明人： Takashi Ohhashi ,  Takanori Sasaki

IPC分类号： G03G15/20

CPC分类号： G03G15/2039 ,  G03G2215/2032

摘要： There is provided a heating controlling device having: a receiving section receiving heating instructions for plural heaters; and a controller that, when the receiving section receives a heating instruction to heat another heater while two or more heaters other than the heater for which the heating instruction is received are heating, stops heating of the heaters that are heating, after a first predetermined time period elapses from the control to stop heating, starts heating of the heater for which the heating instruction is received, and each time a number of second predetermined time periods elapses from the control to start heating, restarts heating, on the basis of predetermined priority rankings, of the heaters that were controlled to stop heating.

摘要翻译： 提供了一种加热控制装置，具有：接收部，其接收多个加热器的加热指令; 以及控制器，当所述接收部接收到加热指令以加热另一个加热器时，除了接收到所述加热指令的加热器之外的两个或更多个加热器加热的情况下，在第一预定时间之后停止加热的加热器的加热 从控制到停止加热的时间段，开始接收加热指令的加热器的加热，并且每次经过从控制开始加热的第二预定时间段的数量，基于预定的优先级排序重新启动加热 ，被控制停止加热的加热器。

公开(公告)号：US20130276431A1

公开(公告)日：2013-10-24

申请号：US13993734

申请日：2010-12-24

申请人： Keiichiro Aoki ,  Takanori Sasaki ,  Go Hayashita

发明人： Keiichiro Aoki ,  Takanori Sasaki ,  Go Hayashita

IPC分类号： F01N11/00

CPC分类号： F01N11/007 ,  F02D41/123 ,  F02D41/1454 ,  F02D41/1476 ,  F02D2041/2051 ,  G01N27/407

摘要： In this invention, an EMF oxygen sensor is subjected to an activation process applying unidirectional voltage between an atmosphere electrode and an exhaust electrode thereof. A control device controlling the oxygen sensor in which a voltage was applied with the atmosphere electrode being positive, additionally applies unidirectional voltage between the electrodes to make the atmosphere electrode positive, for example, when the oxygen sensor was used under an environment in which the air-fuel ratio of the internal combustion engine was rich relative to the theoretical air-fuel ratio. Conversely, A control device controlling the oxygen sensor in which a voltage was applied to make the atmosphere electrode negative, additionally applies unidirectional voltage between the electrodes to make the atmosphere electrode negative, for example, when the oxygen sensor was used under an environment in which the air-fuel ratio was lean relative to the theoretical air-fuel ratio.

摘要翻译： 在本发明中，EMF氧传感器在气氛电极和排气电极之间进行施加单向电压的激活处理。 控制在气氛电极中施加电压的氧传感器的控制装置为正，另外在电极之间施加单向电压，使得气氛电极为正，例如当氧气传感器在空气中的环境下使用时 内燃机的燃料比相对于理论空燃比是丰富的。 相反，控制其中施加电压以使气氛电极为负的氧传感器的控制装置另外在电极之间施加单向电压，以使气氛电极为负值，例如当氧传感器在其中 空燃比相当于理论空燃比。

公开(公告)号：US08402812B2

公开(公告)日：2013-03-26

申请号：US12451647

申请日：2008-12-24

申请人： Takanori Sasaki

发明人： Takanori Sasaki

IPC分类号： G01N7/00

CPC分类号： G01N27/419 ,  F02D41/06 ,  F02D41/123 ,  G01N27/4067

摘要： It is an object of the present invention to provide a gas concentration detection apparatus that is capable of forming an accurate activity judgment when a gas concentration detection cell begins to detect gas concentration with high accuracy. When warm-up begins at time t0 in a NOx concentration detection apparatus that achieves NOx concentration detection with a NOx sensor cell after excess oxygen is discharged by an oxygen pump cell, a NOx sensor cell output begins to rise at time t1. Subsequently, at time t2, an oxygen pump cell output begins to rise. An inflection point appearing in the NOx sensor cell output is then located. At time t5 at which the inflection point appears, an activity judgment about the NOx sensor cell is formed.

摘要翻译： 本发明的目的是提供一种气体浓度检测装置，其能够在气体浓度检测单元开始高精度地检测气体浓度时形成准确的活动判定。 当在氧浓度检测装置中的时间t0开始预热时，在通过氧气泵电池排出了过量的氧气之后，通过NOx传感器单元实现NOx浓度检测，在时刻t1，NOx传感器单元的输出开始上升。 随后，在时间t2，氧气泵电池输出开始上升。 然后定位出现在NOx传感器单元输出中的拐点。 在出现拐点的时间t5，形成关于NOx传感器单元的活动判断。

公开(公告)号：US20130062200A1

公开(公告)日：2013-03-14

申请号：US13638987

申请日：2010-06-23

申请人： Takanori Sasaki

发明人： Takanori Sasaki

IPC分类号： G01N27/41

CPC分类号： G01N27/4175

摘要： An abnormality diagnostic apparatus for a gas sensor includes a NOx sensor includes a main pump cell, an auxiliary pump cell, and a detection cell. The apparatus diagnoses at least one of the detection cell, the main pump cell, and the auxiliary pump cell for an abnormality, based on at least one of a rising characteristic of a NOx output of the detection cell immediately after a start of detection of the NOx output, its peak value, and its subsequent falling characteristic. An abnormality of the detection cell is determined if a speed with which the NOx output rises is small; an abnormality of at least one of the main pump cell and the auxiliary pump cell is determined if a speed with which the NOx output falls is small; and an abnormality of the detection cell is determined if the peak value of the NOx output is small.

摘要翻译： 用于气体传感器的异常诊断装置包括：NOx传感器，包括主泵电池，辅助泵电池和检测单元。 该装置基于检测单元的开始后的检测单元的NOx输出的上升特性中的至少一个来诊断用于异常的检测单元，主泵单元和辅助泵单元中的至少一个 NOx输出，其峰值及其随后的下降特性。 如果NOx输出上升的速度小，则确定检测单元的异常; 如果NOx输出下降的速度小，则确定主泵电池和辅助泵电池中的至少一个的异常; 并且如果NOx输出的峰值小，则确定检测单元的异常。

公开(公告)号：US07477955B2

公开(公告)日：2009-01-13

申请号：US10565759

申请日：2004-05-25

申请人： Takanori Sasaki ,  Toshiharu Yamamoto ,  Yoshihito Fukasawa

发明人： Takanori Sasaki ,  Toshiharu Yamamoto ,  Yoshihito Fukasawa

IPC分类号： G06F17/50 ,  G06F19/00

CPC分类号： B65D81/053 ,  B65D81/058 ,  B65D81/107 ,  G06F17/50 ,  G06F2217/38

摘要： An object of the present invention enables provision of an optimum shape design method in which an optimum shape of a cushioning material used in cushioning packaging can easily and adequately be designed, and an optimum shape design system in which the optimum shape design method is used. In a configuration of the optimum shape design system is characterized by providing an optimizing control unit 2a. The optimizing control unit 2a detects a correlation among CAD data M of a cushioning material 4 defined by a CAD unit 2b, a mechanical response amount detected by a mechanical response amount calculation unit 2c, manufacturing decision information detected by a manufacturing decision detection unit 2d, and manufacturing cost information detected by a cost calculation unit 2e. Then, the optimizing control unit 2a updates the CAD data M of the cushioning material 4 until an optimum shape of the cushioning material 4 is detected based on the correlation. In the optimum shape, the mechanical response amount satisfies design conditions of the cushioning material 4, the cushioning material 4 is producible, and a minimum manufacturing cost is obtained. Then, the optimizing control unit 2a updates the correlation based on the changed CAD data M, and the optimizing control unit 2a detects the optimum shape of the cushioning material 4 based on the updated correlation.

摘要翻译： 本发明的目的是提供一种最佳形状设计方法，其中可以容易且适当地设计用于缓冲包装的缓冲材料的最佳形状，以及使用最佳形状设计方法的最佳形状设计系统。 在最佳形状设计系统的结构中，其特征在于提供优化控制单元2a。 优化控制单元2a检测由CAD单元2b限定的缓冲材料4的CAD数据M，由机械响应量计算单元2c检测到的机械响应量，由制造判定检测单元2d检测的制造判定信息之间的相关性， 以及由成本计算单元2e检测的制造成本信息。 然后，优化控制单元2a更新缓冲材料4的CAD数据M，直到基于相关性检测缓冲材料4的最佳形状。 在最佳形状中，机械响应量满足缓冲材料4的设计条件，缓冲材料4可生产，并且获得最小的制造成本。 然后，优化控制单元2a基于改变的CAD数据M更新相关性，并且优化控制单元2a基于更新的相关性来检测缓冲材料4的最佳形状。

公开(公告)号：US20070293967A1

公开(公告)日：2007-12-20

申请号：US10565759

申请日：2004-05-25

申请人： Takanori Sasaki ,  Toshiharu Yamamoto ,  Yoshihito Fukasawa

发明人： Takanori Sasaki ,  Toshiharu Yamamoto ,  Yoshihito Fukasawa

IPC分类号： G06F17/50 ,  G06F19/00

CPC分类号： B65D81/053 ,  B65D81/058 ,  B65D81/107 ,  G06F17/50 ,  G06F2217/38

摘要： An object of the present invention enables provision of an optimum shape design method in which an optimum shape of a cushioning material used in cushioning packaging can easily and adequately be designed, and an optimum shape design system in which the optimum shape design method is used. In a configuration of the optimum shape design system is characterized by providing an optimizing control unit 2a. The optimizing control unit 2a detects a correlation among CAD data M of a cushioning material 4 defined by a CAD unit 2b, a mechanical response amount detected by a mechanical response amount calculation unit 2c, manufacturing decision information detected by a manufacturing decision detection unit 2d, and manufacturing cost information detected by a cost calculation unit 2e. Then, the optimizing control unit 2a updates the CAD data M of the cushioning material 4 until an optimum shape of the cushioning material 4 is detected based on the correlation. In the optimum shape, the mechanical response amount satisfies design conditions of the cushioning material 4, the cushioning material 4 is producible, and a minimum manufacturing cost is obtained. Then, the optimizing control unit 2a updates the correlation based on the changed CAD data M, and the optimizing control unit 2a detects the optimum shape of the cushioning material 4 based on the updated correlation.

摘要翻译： 本发明的目的是提供一种最佳形状设计方法，其中可以容易且适当地设计用于缓冲包装的缓冲材料的最佳形状，以及使用最佳形状设计方法的最佳形状设计系统。 在最佳形状设计系统的配置中，其特征在于提供优化控制单元2a。 优化控制单元2a检测由CAD单元2b限定的缓冲材料4的CAD数据M与由机械响应量计算单元2c检测到的机械响应量之间的相关性，由制造决策检测检测到的制造决策信息 单元2d和由成本计算单元2 e检测的制造成本信息。 然后，优化控制单元2更新缓冲材料4的CAD数据M，直到基于相关性检测到缓冲材料4的最佳形状。 在最佳形状中，机械响应量满足缓冲材料4的设计条件，缓冲材料4可生产，并且获得最小的制造成本。 然后，优化控制单元2a基于改变的CAD数据M更新相关性，并且优化控制单元2a基于更新的相关性来检测缓冲材料4的最佳形状。

公开(公告)号：US09732657B2

公开(公告)日：2017-08-15

申请号：US13993734

申请日：2010-12-24

申请人： Keiichiro Aoki ,  Takanori Sasaki ,  Go Hayashita

发明人： Keiichiro Aoki ,  Takanori Sasaki ,  Go Hayashita

IPC分类号： F01N11/00 ,  G01N27/407 ,  F02D41/12 ,  F02D41/14 ,  F02D41/20

CPC分类号： F01N11/007 ,  F02D41/123 ,  F02D41/1454 ,  F02D41/1476 ,  F02D2041/2051 ,  G01N27/407

摘要： In this invention, an EMF oxygen sensor is subjected to an activation process applying unidirectional voltage between an atmosphere electrode and an exhaust electrode thereof. A control device controlling the oxygen sensor in which a voltage was applied with the atmosphere electrode being positive, additionally applies unidirectional voltage between the electrodes to make the atmosphere electrode positive, for example, when the oxygen sensor was used under an environment in which the air-fuel ratio of the internal combustion engine was rich relative to the theoretical air-fuel ratio. Conversely, a control device controlling the oxygen sensor in which a voltage was applied to make the atmosphere electrode negative, additionally applies unidirectional voltage between the electrodes to make the atmosphere electrode negative, for example, when the oxygen sensor was used under an environment in which the air-fuel ratio was lean relative to the theoretical air-fuel ratio.

公开(公告)号：US20140250993A1

公开(公告)日：2014-09-11

申请号：US14350685

申请日：2011-10-24

申请人： Keiichiro Aoki ,  Go Hayashita ,  Takanori Sasaki

发明人： Keiichiro Aoki ,  Go Hayashita ,  Takanori Sasaki

IPC分类号： F01N11/00

CPC分类号： F01N11/007 ,  F01N3/101 ,  F01N2550/02 ,  F01N2560/025 ,  F01N2560/14 ,  F01N2900/0416 ,  F01N2900/1624 ,  F02D41/1441 ,  F02D41/1456 ,  Y02T10/22 ,  Y02T10/47

摘要： An oxygen amount (an oxygen storage amount OSA) stored by metal cerium during a storage cycle is obtained based on an output value of an A/F sensor in a time period immediately before an exhaust air-fuel ratio (a downstream side A/F) detected by the A/F sensor shifts to a lean region, and degradation relating to OSC of the three-way catalyst is detected. In the storage cycle, a target air-fuel ratio is set so that an air-fuel ratio of exhaust emission flowing into an S/C changes from rich to lean. Therefore, the downstream side A/F shifts from stoichiometry to the lean region at a time after reaching stoichiometry. When the three-way catalyst degrades, the downstream side A/F shifts to the lean region from stoichiometry at a time. Therefore, the calculated oxygen storage amount OSA becomes extremely smaller as compared with that at a normal time.

摘要翻译： 基于A / F传感器在排气空燃比之前的时间段（下游侧A / F）中的输出值，获得在储存循环期间由金属铈储存的氧量（储氧量OSA） ）移动到贫气区域，并且检测到与三元催化剂的OSC相关的降解。 在存储循环中，设定目标空燃比，使流入S / C的排气的空燃比从浓到稀。 因此，在达到化学计量之后的一段时间，下游侧A / F从化学计量转移到稀薄区域。 当三元催化剂劣化时，下游侧A / F一次从化学计量转移到贫的区域。 因此，与常规时间相比，计算出的氧气存储量OSA变得非常小。

公开(公告)号：US20140075924A1

公开(公告)日：2014-03-20

申请号：US14114770

申请日：2011-05-19

申请人： Keiichiro Aoki ,  Takanori Sasaki ,  Go Hayashita

发明人： Keiichiro Aoki ,  Takanori Sasaki ,  Go Hayashita

IPC分类号： F01N3/18

CPC分类号： F02D41/2474 ,  F01N3/18 ,  F02D41/0235 ,  F02D41/1441 ,  F02D41/1456 ,  F02D41/2438 ,  F02D41/2441 ,  F02D41/2454

摘要： A correction device for an air/fuel ratio sensor in the present invention, the sensor issuing an output according to an air/fuel ratio and installed on the downstream from catalyst of the exhaust passage, has air/fuel ratio control means for controlling an air/fuel ratio of an exhaust gas on the upstream side from a catalyst to switch between a rich air/fuel ratio which is richer and a lean air/fuel ratio which is leaner than a stoichiometric air/fuel ratio. Moreover, correction means for correcting an output of the sensor in accordance with a difference between the output of the sensor during a predetermined period during air/fuel ratio control by the air/fuel ratio control means, and a reference output corresponding to a stoichiometric air/fuel ratio, is provided.

摘要翻译： 本发明的空气/燃料比传感器的校正装置中，具有空气/燃料比的输出装置，安装在排气通路的催化剂下游的传感器具有空气/燃料比控制装置， /从催化剂上游侧排出的废气的燃料比在富空燃比和比理论空燃比稀的稀空燃比之间切换。 此外，根据空气/燃料比控制装置的空气/燃料比控制期间的预定时间段期间传感器的输出之间的差异校正装置以及对应于理论空燃比的参考输出的校正装置 /燃料比。