公开(公告)号：US20070000608A1

公开(公告)日：2007-01-04

申请号：US11174229

申请日：2005-07-01

申请人： Ke Lee ,  Shinichi Kurita ,  Emanuel Beer

发明人： Ke Lee ,  Shinichi Kurita ,  Emanuel Beer

IPC分类号： C23F1/00

CPC分类号： F16K3/0227 ,  F16K51/02 ,  H01J37/32844 ,  H01J2237/166 ,  H01L21/67126 ,  Y02C20/30 ,  Y02P70/605 ,  Y10S277/919 ,  Y10S277/92 ,  Y10T137/8242

摘要： A method and apparatus for grounding a chamber isolation valve are provided. Generally, the method makes use of an electrically conductive elastomeric member or members to effectively ground a chamber isolation valve and/or isolation valve door while avoiding metal-to-metal contact between moving parts in the processing system. In one embodiment, the elastomeric member is attached to and in electrical communication with the door of the chamber isolation valve. The elastomeric member is brought into contact with a grounded component of the plasma processing system when the door is in the closed position. In another embodiment, the conductive elastomeric member is attached to a bracing member of the isolation valve and is brought into contact with a grounded component of the plasma processing system when the bracing member is deployed to hold the isolation valve door in place during substrate processing. Other configurations are also provided.

摘要翻译： 提供了一种用于使室隔离阀接地的方法和装置。 通常，该方法利用导电弹性体构件来有效地将室隔离阀和/或隔离阀门接地，同时避免处理系统中移动部件之间的金属与金属的接触。 在一个实施例中，弹性体构件附接到腔室隔离阀的门并且与腔室隔离阀的门电连通。 当门处于关闭位置时，弹性体构件与等离子体处理系统的接地部件接触。 在另一个实施例中，当支撑构件展开以在衬底处理期间将隔离阀门保持在适当位置时，导电弹性构件附接到隔离阀的支撑构件并与等离子体处理系统的接地构件接触。 还提供其他配置。

公开(公告)号：US20060249701A1

公开(公告)日：2006-11-09

申请号：US11480615

申请日：2006-07-03

申请人： Shinichi Kurita ,  Ke Lee ,  Wendell Blonigan

发明人： Shinichi Kurita ,  Ke Lee ,  Wendell Blonigan

IPC分类号： F16K25/00

CPC分类号： H01L21/67126 ,  F16K3/188 ,  F16K51/02

摘要： In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a second opening formed in the second wall. The slit valve also includes a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall. The slit valve further includes at least one actuating mechanism adapted to (1) move the sealing portion toward the second wall and into contact with the second wall; and (2) move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall. Numerous other aspects are provided.

摘要翻译： 在一个实施例中，提供了狭缝阀，其适于密封开口并且包括具有第一壁，形成在第一壁中的第一开口，形成在第二壁中的第二壁和第二开口的阀壳体。 狭缝阀还包括封闭构件，其具有适于接触第二壁并密封第二开口的密封部分，以及可相对于密封部分移动并适于接触第一壁的支撑构件。 狭缝阀还包括至少一个致动机构，其适于（1）将密封部分朝向第二壁移动并与第二壁接触; 和（2）将支撑构件移动离开密封部分并与第一壁接触，以将密封部分支撑在第二壁上。 提供了许多其他方面。

公开(公告)号：US20050283013A1

公开(公告)日：2005-12-22

申请号：US11115553

申请日：2005-04-26

申请人： Ke Lee ,  Sang-Bum Lee

发明人： Ke Lee ,  Sang-Bum Lee

IPC分类号： C07F15/00 ,  C07C319/20 ,  C07C323/52 ,  C07F1/08 ,  C07F3/06 ,  C07F13/00 ,  C07F15/02 ,  C07F15/06

CPC分类号： C07C319/20 ,  C07C323/52

摘要： A method for the preparation of organic chelates utilized as ingredients of animal feedstuffs. The organic chelates are passed to the intestines of livestock without decomposition in the stomach, and thereby have a high absorption rate. The present invention provides a preparation method of perfect chelate minerals having a high yield and containing copper, zinc, iron, manganese, or cobalt. The organic chelate mineral is prepared by precipitating metal sulfates or chlorides with sodium hydroxide or potassium hydroxide in a solution of two equivalents of an amino acid completely dissolved at above 70° C., collecting metal hydroxide by removing sodium sulfate, potassium sulfate, sodium chloride or potassium chloride through filtering, dissolving the metal hydroxide by adding the equivalent weights of hydrochloric acid, and then neutralizing the hydrochloric acid added for dissolving metal hydroxide.

摘要翻译： 制备用作动物饲料成分的有机螯合物的方法。 有机螯合物在胃中不分解而通过家畜肠道，因此吸收率高。 本发明提供了一种具有高产率并含有铜，锌，铁，锰或钴的完美螯合矿物的制备方法。 有机螯合矿物是通过在氢氧化钠或氢氧化钾中在2当量的完全溶解在70℃以上的氨基酸的溶液中沉淀金属硫酸盐或氯化物来制备的，通过除去硫酸钠，硫酸钾，氯化钠来收集金属氢氧化物 或氯化钾过滤，通过加入等当量的盐酸溶解金属氢氧化物，然后中和加入以溶解金属氢氧化物的盐酸。