公开(公告)号：US06441554B1

公开(公告)日：2002-08-27

申请号：US09854655

申请日：2001-05-14

申请人： Kee-Seok Nam ,  Sang-Ro Lee ,  Jong-Ju Rha ,  Koo-Hyun Lee ,  Jong-Kuk Kim

发明人： Kee-Seok Nam ,  Sang-Ro Lee ,  Jong-Ju Rha ,  Koo-Hyun Lee ,  Jong-Kuk Kim

IPC分类号： H01J724

CPC分类号： A61L9/22 ,  C01B13/11 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C02F1/72 ,  C02F2201/48 ,  C02F2201/782 ,  C02F2305/023 ,  H01J37/32009

摘要： Disclosed is an apparatus for generating low-temp plasma at atmospheric pressure, comprising: a couple of electrodes facing each other at a distance, one of them being connected to a power supply, the other being grounded; a couple of dielectrics with a thickness of 25 &mgr;m-10 mm, positioned on the facing surfaces of the electrodes in such a way as to face each other, one of them having at least one discharge gap therein; and a conductor electrode having at least one tip positioned within the discharge gap, in which an electric field is applied at an intensity of 1-100 KV/cm through the power supply across the electrodes by use of a pulse direct current or an alternating current in a frequency bandwidth of 50 Hz-10 GHz while a reaction gas is fed between the electrodes, so as to induce a hollow cathode discharge, a capillary discharge or the high accumulation of charges from the discharge gap.

摘要翻译： 公开了一种用于在大气压下产生低温等离子体的装置，包括：一对彼此面对的电极，其中一个电极连接到电源，另一个电极接地; 一对厚度为25mum-10mm的电介质，以彼此面对的方式定位在电极的相对表面上，其中一个在其中具有至少一个放电间隙; 以及导体电极，其具有位于放电间隙内的至少一个尖端，其中以1-100KV / cm的强度施加电场，通过使用脉冲直流或交流电流通过电极通过电源施加电场 在50Hz-10GHz的频率带宽中，同时在电极之间供给反应气体，从而引起中空阴极放电，毛细管放电或来自放电间隙的高电荷累积。